Surface nanostructuring of alkali-aluminosilicate Gorilla display glass substrates using a maskless process

Rongtao Cao,Ziyu Zhou,Sajad Haghanifar,Jingyu Wu,Ming-Jun Li,Susheng Tan,Paul W Leu,Kevin P Chen
DOI: https://doi.org/10.1088/1361-6528/ac5a81
IF: 3.5
2022-03-23
Nanotechnology
Abstract:Abstract This paper reports on the formation of moth-eye nanopillar structures on surfaces of alkali-aluminosilicate Gorilla glass substrates using a self-masking plasma etching method. Surface and cross-section chemical compositions studies were carried out to study the formation of the nanostructures. CF x induced polymers were shown to be the self-masking material during plasma etching. The nanostructures enhance transmission at wavelengths over 525 nm may be utilized for fluid-induced switchable haze. Additional functionalities associated with nanostructures may be realized such as self-cleaning, anti-fogging, and stain-resistance.
materials science, multidisciplinary,physics, applied,nanoscience & nanotechnology
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