Engineered arrays of NV color centers in diamond based on implantation of CN- molecules through nanoapertures

P. Spinicelli,A. Dréau,L. Rondin,F. Silva,J. Achard,S. Xavier,S. Bansropun,T. Debuisschert,S. Pezzagna,J. Meijer,V. Jacques,J. -F. Roch,J.-F. Roch
DOI: https://doi.org/10.48550/arXiv.1008.1483
2010-08-09
Quantum Physics
Abstract:We report a versatile method to engineer arrays of nitrogen-vacancy (NV) color centers in dia- mond at the nanoscale. The defects were produced in parallel by ion implantation through 80 nm diameter apertures patterned using electron beam lithography in a PMMA layer deposited on a diamond surface. The implantation was performed with CN- molecules which increased the NV defect formation yield. This method could enable the realization of a solid-state coupled-spin array and could be used for positioning an optically active NV center on a photonic microstructure.
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