Reaction analysis and the removal mechanism of organic contaminants in plasma cleaning: a molecular dynamics simulation

Qingshun Bai,Xujie Liu,Hao Sun,Yuhai Li,Xueshi Xu,Peng Zhang
DOI: https://doi.org/10.1039/d3nj04298g
IF: 3.3
2023-01-01
New Journal of Chemistry
Abstract:DBP clusters were removed by nitrogen and oxygen plasma. The effects of the incidence duration, particle energies, and particle types on the decomposition were investigated. Decomposition pathways were further confirmed by bond dissociation energies.
chemistry, multidisciplinary
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