Abstract:Ultrashort-pulse laser surface and bulk nano- and micromachining of dielectrics have multiple promising applications in micro-optics, microfluidics, and memory storage. The fundamental principles relate intrinsic inter-band multi-photon (MPA) and laser-induced intra-band free-carrier absorption (FCA) to particular ablation mechanisms and features. These principles are yet to be quantified into a complete set of basic experimental laser-matter interaction parameters, describing photoexcitation, relaxation, and final ablation. In this study, we considered the characteristic double-crater structure of single-shot ablation spots on dielectric surfaces and single-shot transmission spectra to extract crucial information about the underlying basic processes of ultrafast photoexcitation and laser energy deposition. Specifically, energy-dependent crater profiles and accompanying prompt self-phase modulation (SPM) spectral broadening were studied in single-shot surface ablation experiments on fluorite (CaF 2 ) surface photo-excited by tightly focused 515- or 1030-nm, 300-fs laser pulses. Crater size dependence demonstrated two slopes, scaling proportionally to the squared focal 1/e-radius at higher energies (intensities) for larger ablated spots, and a much smaller squared 1/e-radius at lower energies (intensities) for (sub) micron-wide ablated spots, indicating a transition from 1D to 3D-ablation. As a result, these slopes were related to lower-intensity wavelength-dependent multi-photon inter-band transitions and wavelength-independent higher-intensity linear absorption in the emerging near-critical electron-hole plasma (EHP), respectively. Crater depth dependences on the local laser intensity fitted in the corresponding ranges by multi- and one-photon absorption provided the corresponding absorption coefficients. Spectral broadening measurements indicated even values for the red and blue shoulders of the laser pulse spectrum, representing the SPM effect in the weakly excited fluorite at the leading pulse front and providing the corresponding Kerr coefficient. In the second regime, the blue-shoulder broadening value saturated, indicating the appearance of near-critical plasma screening at the trailing pulse front, which is consistent with our calculations. These complementary experiments and related analysis provided an important set of key basic parameters, characterizing not only surface ablation, but also propagation of high-intensity ultrashort laser pulses in bulk fluorite, and enabling precise forecasting of optimal energy deposition for high-efficiency ultrashort-laser micro-structuring of this dielectric material.

Laser ablation of dielectrics with pulse durations between 20 fs and 3 ps

Ultrashort pulse laser ablation of dielectrics: Thresholds, mechanisms, role of breakdown

Physics of picosecond pulse laser ablation

The physical mechanisms of short-pulse laser ablation

Ultrashort double pulse laser ablation of metals

An investigation on 800 nm femtosecond laser ablation of K9 glass in air and vacuum

Laser amplification in excited dielectrics

Laser-Metal Interaction with a Pulse Shorter than the Ion Period: Ablation Threshold, Electron Emission and Ion Explosion

Femtosecond Laser Ablation of an Aluminum Target in Air

Picosecond Laser Ablation of Millimeter-Wave Subwavelength Structures on Alumina and Sapphire

Ablation of solids by femtosecond lasers: Ablation mechanism and ablation thresholds for metals and dielectrics

Ultrafast dynamics of hard tissue ablation using femtosecond-lasers

Experimental Study on 800 Nm Femtosecond Laser Ablation of Fused Silica in Air and Vacuum

Ablation-cooled material removal with ultrafast bursts of pulses

Ultrashort laser pulse ablation of copper, silicon and gelatin: effect of the pulse duration on the ablation thresholds and the incubation coefficients

Ion distribution and ablation depth measurements of a fs-ps laser-irradiated solid tin target

Ablation of TiO2 Surface with a Double-Pulse Femtosecond Laser

Single-shot ultrafast imaging of plasma dynamics induced by dual-angle ultrashort laser pulses with subpicosecond delay

Characterization of laser-induced ionization dynamics in solid dielectrics

Ultrafast pump-probe ellipsometry and microscopy reveal the surface dynamics of femtosecond laser ablation of aluminium and stainless steel

Energy deposition parameters revealed in the transition from 3D to 1D femtosecond laser ablation of fluorite at high-NA focusing