Abstract:The hard-to-process properties associated with high hardness and high brittleness of sapphire drastically limit the services of optics, low-damage or damage-free properties are essential to the performance of sapphire optics. To achieve efficient and damage-free sapphire optics, a series of experiments involving ultra-precision grinding, polishing, and ion beam polishing were conducted. Initially, the surface and subsurface characteristics of sapphire ultra-precision grinding were examined, and the evolution of damage during polishing was discussed. Chemical etching was performed to evaluate the subsurface damage caused by polishing, ion beam polishing was used to eliminate subsurface damage. Finally, focused ion beam (FIB) and transmission electron microscopy (TEM) were employed to analyze the atomic structure of the subsurface. The results demonstrated that ultra-precision grinding can produce a ductile grinding surface and minimize subsurface damage, the difference in grinding damage on the outside and center of the workpiece was suppressed. The evolution of the surface roughness and damage behavior during polishing varied depending on the specific grinding strategy, ultra-precision grinding decreased damage removal time by 1/4. Photothermal absorption was utilized to monitor the damage progression during the polishing process and detect the presence of subsurface damage beneath the Beilby layer. Etching revealed that the subsurface damage was primarily caused by scratches, which was effectively eliminated after ion beam polishing. High-magnification TEM images provided compelling evidence of damage at the close-to-atomic scale for sapphire optics. Only amorphous structures smaller than 2 nm were observed on the subsurface, most of the atomic structure remained intact, albeit with irregular arrangement. Additionally, the grinding marks were mitigated after polishing.

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Refractive Index and Phase Transformation of Sapphire under Shock Pressures Up to 210 GPa

Superior optical transparency of nano-grain magnesium aluminate spinel at high shock pressure

Strongly Anisotropic Thermomechanical Response to Shock Wave Loading in Oriented Samples of the Triclinic Molecular Crystal 1,3,5-Triamino-2,4,6-Trinitrobenzene (TATB)

Shock induced damage and damage threshold of optical K9 glass investigated by laser-driven shock wave

X-ray diffraction from shock-loaded polycrystals

Methodology for Studying Brittle Fracture of HTHP Diamond Single Crystals by Crack Propagation Analysis under Shock Load

Thermal and optical properties of the femtosecond-laser-structured and stress-induced birefringent regions in sapphire

Dynamic Response of YAG Polycrystalline and Single‐crystal Transparent Ceramics: Experiments and Mesoscopic Simulations

Sapphire Selective Laser Etching Dependence on Radiation Wavelength and Etchant

Investigation into the Anisotropy of Cross-Grinding Surface Quality in C- and M-planes of Sapphire

Shock impedance adjustment using anion and cation components: From γ-Al2O3 to Al(8+)/3□(1/3-/3)O4-N and Mg1-Al2+O4-N transparent ceramic windows

Small Bragg-plane slope errors revealed in synthetic diamond crystals

Effect of different grinding strategies on subsequent polishing processes of sapphire

Dynamic response of a Li2O-Al2O3-SiO2 transparent glass-ceramic under shock compression

Dependence of Material Removal on Crystal Orientation of Sapphire under Cross Scratching

Preparation, quality characterization, service performance evaluation and its modification of sapphire crystal for optical window and dome application

Numerical modeling of dynamic response and microcracking in shock-loaded polycrystalline transparent ceramic

Chemical mechanical polishing (CMP) anisotropy in sapphire

Damage Mechanisms Perspective on Superior Ballistic Performance of Spinel over Sapphire