Abstract:The influence of nitrogen plasma generated by electron cyclotron resonance (ECR) microwave discharge on deposition of carbon nitride films by means of ECR plasma assisted reactive pulsed laser deposition was investigated by a comparative study on the optical emission of the plume produced by pulsed laser ablation of a graphite target in ECR nitrogen plasma, in vacuum and in low-pressure nitrogen gas ambient. Spatial and temporal spectroscopic measurements show that in vacuum optical emission lines originating from carbon atoms and ions dominate the plume emission, while in low-pressure N2 ambient weak CN emissions appear. In nitrogen plasma, the plume emission exhibits itself very differently. It evolves from consisting of emissions almost from mono-atomic carbon atoms and ions to being dominated by emissions from CN molecules. The presence of the reactive nitrogen plasma greatly enhanced the CN emissions and eliminated the emission lines from carbon atoms and ions. The appearance of the CN emissions occurs after the emissions from carbon atoms and ions have decayed considerably, indicating that the dominant mechanism for the formation of CN molecules is gaseous phase reaction. Carbon nitride films with nitrogen content of about 40 at.% were obtained. Possible processes for CN molecule formation in gaseous phase and mechanisms responsible for efficient nitrogen incorporation and carbon nitride film deposition were suggested.

The Laser Ablation Production of Platinum Nitride and its Possible Structure

Synthesis of C3N4+ by the Combination of Laser Ablation of Graphite and N2 Molecular Beam

Interstitial Dinitrogen Makes Ptn2 an Insulating Hard Solid

Platinum Nitride with Fluorite Structure

Synthesis and Characterization of the Nitrides of Platinum and Iridium

Synthesis and characterization of a binary noble metal nitride

Reactions of Laser-Ablated Niobium, Tantalum, and Rhenium Atoms with Nitrogen Atoms and Molecules. Infrared Spectra and Density Functional Calculations of the Metal Nitride and Dinitride Molecules

Synthesis of Carbon Nitride Films by Arc-Heated Atomic Nitrogen Beams Assisted Pulsed Laser Ablation

Reactions of Laser-Ablated Aluminum Atoms with Nitrogen Atoms and Molecules. Infrared Spectra and Density Functional Calculations for the AlN2, Al2N, Al2N2, AlN3, and Al3N Molecules

Matrix Isolation Infrared Spectroscopic and Theoretical Study of Nickel, Palladium, and Platinum Nitrous Oxide Complexes.

Systematical high-pressure study of praseodymium nitrides in N-rich region

Optical Emission Spectroscopy of the Nitrogen Arc in an Arc-Heated Beam Source Used for Synthesis of Carbon Nitride Films

Reactions of Laser-Ablated Aluminum Atoms with Nitrogen During Condensation at 10 K. Infrared Spectra and Density Functional Calculations for AlxNy Molecular Species

A New Family of Transition Metal Nitrides

Characterization and modification of carbon nitride films deposited by laser ablation under low energy ion‐beam bombardment

Spectroscopic Study on Pulsed Laser Ablation of Graphite Target in Ecr Nitrogen Plasma for Carbon Nitride Film Deposition

Structural Property Of Platinum Mononitride

Growth and Composition of Covalent Carbon Nitride Solids

Characterization of plasma and gas-phase chemistry during boron-nitride nanomaterial synthesis by laser-ablation of boron-rich targets

Electronic Structure of Carbon Nitride Thin Films Studied by X-ray Spectroscopy Techniques