Abstract:A nitrogen-aluminum-gallium-arsenic plasma is formed by pulsed laser co-ablation of an Al target and a GaAs target in electron cyclotron resonance discharge-generated nitrogen plasma for AlxGa1-xN film deposition. The formed plasma was characterized by time-integrated and time-resolved optical emission spectroscopy measurements and the process of AlxGa1-xN deposition was discussed. The plasma contains excited species originally present in the working N-2 gas and energetic species ablated from the targets, and its emission is abundant in the emission bands of diatomic nitrogen molecules and molecular ions and the emission lines of monoatomic aluminum, gallium, and arsenic atoms and atomic ions. The temporal and spatial features of the plasma emission reveal that the nitrogen species in the electron cyclotron resonance nitrogen plasma experience additional excitations due to the expanding ablation plumes, and the ablated species are excited frequently when traveling with the expanding plumes in the nitrogen plasma, making the formed plasma very reactive, which is very important in the process of AlxGa1-xN film deposition. The deposited film was evaluated for composition analysis by energy-dispersive x-ray spectroscopy and structure characterization by x-ray diffraction. The AlxGa1-xN film is slightly nitrogen rich with an aluminum content x of about 0.6 and featured with hexagonal wurtzite crystal structure with preferred c-axis orientation.

Reactions of Laser-Ablated Aluminum Atoms with Nitrogen During Condensation at 10 K. Infrared Spectra and Density Functional Calculations for AlxNy Molecular Species

Reactions of Laser-Ablated Aluminum Atoms with Nitrogen Atoms and Molecules. Infrared Spectra and Density Functional Calculations for the AlN2, Al2N, Al2N2, AlN3, and Al3N Molecules

Reactions of Laser-Ablated Niobium, Tantalum, and Rhenium Atoms with Nitrogen Atoms and Molecules. Infrared Spectra and Density Functional Calculations of the Metal Nitride and Dinitride Molecules

Synthesis of C3N4+ by the Combination of Laser Ablation of Graphite and N2 Molecular Beam

Matrix Infrared Spectra and Density Functional Calculations of Three Al, N, O Isomers

Reactions of Laser-Ablated Ga, In, and Tl Atoms with Nitrogen Atoms and Molecules. Infrared Spectra and Density Functional Calculations of Gan, Ngan, Ninn, and the M3n and Mn3 Molecules

A Mass Spectrometrical Surface Chemistry Study of Aluminum Nitride ALD from Tris-Dimethylamido Aluminum and Ammonia

Surface chemistry in atomic layer deposition of AlN thin films from Al(CH3)3 and NH3 studied by mass spectrometry

Reactions of Laser-Ablated Niobium and Tantalum Atoms with NO. Infrared Spectra of the NMO, M(η-NO)x (x = 2, 3), and (N2)(MO2) Molecules in Solid Argon

Gas-Phase Chemical Reaction Mechanism in the Growth of AlN during High-Temperature MOCVD: A Thermodynamic Study

Reactions of Laser-Ablated Cu with NO: Infrared Spectra and Density Functional Calculations of CuNO+, CuNO, Cu(NO)2, and Cu(NO)2- in Solid Neon and Argon

Toward homogenous AlN via reaction of Al nanoparticles with N 2 and NH 3 : Reactive molecular dynamics simulation

IR Spectroscopic and DFT Studies on the Reactions of Laser-Ablated Nb Atoms with Carbon Dioxide

Low-temperature Synthesis of AlN Films Through Electron Cyclotron Resonance Plasma-Aided Reactive Pulsed Laser Deposition

Growth of Spontaneous Nucleation AlN Crystals by Al-Base Alloy Evaporation in Nitrogen Atmosphere

Aln Nanorings

Reaction Pathway and Rovibrational Analysis of Aluminum Nitride Species as Potential Dust Grain Nucleation Agents

Reactions of Laser-Ablated Chromium Atoms with Nitric Oxide: Infrared Spectra of NCrO, Cr−(η-NO)<sub><i>X</i></sub> (<i>x</i> = 1, 2, 3, 4), and Cr-η-NO in Solid Argon

Spectroscopic Characterization of the Plasma Generated During the Deposition of AlxGa1−xN Films by Pulsed Laser Co-Ablation of Al and GaAs Targets in Electron Cyclotron Resonance Nitrogen Plasma

Reactions of Laser-Ablated Chromium Atoms with Nitric Oxide: Infrared Spectra of NCrO, Cr−(η<sup>1</sup>-NO)<sub><i>X</i></sub>(<i>x</i>= 1, 2, 3, 4), and Cr-η<sup>2</sup>-NO in Solid Argon