Abstract:Elastic strain engineering utilizes stress to realize unusual material properties. For instance, strain can be used to enhance the electron mobility of a semiconductor, enabling more efficient solar cells and smaller, faster transistors. In the context of nanomechanics, the pursuit of resonators with ultra-high coherence has led to intense study of a complementary strain engineering technique, "dissipation dilution", whereby the stiffness of a material is effectively increased without added loss. Dissipation dilution is known to underlie the anomalously high Q factor of Si$_3$N$_4$ nanomechanical resonators, including recently-developed "soft-clamped" resonators; however, the paradigm has to date relied on weak strain produced during material synthesis. By contrast, the use of geometric strain engineering techniques -- capable of producing local stresses near the material yield strength -- remains largely unexplored. Here we show that geometric strain combined with soft-clamping can produce unprecedentedly high Q nanomechanical resonators. Specifically, using a spatially non-uniform phononic crystal pattern, we colocalize the strain and flexural motion of a Si$_3$N$_4$ nanobeam, while increasing the former to near the yield strength. This combined strategy produces string-like modes with room-temperature Q$\times$frequency products approaching $10^{15}$ Hz, an unprecedented value for a mechanical oscillator of any size. The devices we study can have force sensitivities of aN/rtHz, perform hundreds of quantum coherent oscillations at room temperature, and attain Q > 400 million at radio frequencies. These results signal a paradigm shift in the control of nanomechanical dissipation, with impact ranging from precision force microscopy to tests of quantum gravity. Combining the reported approach with crystalline or 2D materials may lead to further improvement, of as yet unknown limitation.

Coherent Signal Amplification in Bistable Nanomechanical Oscillators by Stochastic Resonance

Signal amplification in a nanomechanical Duffing resonator via stochastic resonance

Enhancing switching in bistable nanomechanical oscillators by geometrical resonance

Signal Processing and Control in Nonlinear Nanomechanical Systems

Tunable Stochastic State Switching in 2D MoS2 Nanomechanical Resonators with Nonlinear Mode Coupling and Internal Resonance.

Non-Markovian Stochastic Resonance of Light in a Microcavity

Stochastic switching and squeeze of hysteresis window in nonlinear responses of silicon nitride membrane nanoelectromechanical resonators

Weak signal enhancement by nonlinear resonance control in a forced nano-electromechanical resonator

Nanomechanical Analog of a Laser: Amplification of Mechanical Oscillations by Stimulated Zeeman Transitions

Microwave amplification with nanomechanical resonators

Reverse Aperiodic Resonance in Low- to High-Dimensional Bistable Systems: A Complement to Stochastic Resonance Studies in Logic Circuits

Vibrational Resonance Amplification in a Thermo-Optic Optomechanical Nanocavity

Noise Suppression of On-Chip Mechanical Resonators by Chaotic Coherent Feedback

Stochasticity in the synchronization of strongly coupled spiking oscillators

Weak signal enhancement by non-linear resonance control in a forced nano-electromechanical resonator

Amplification of weak signals and stochastic resonance via on-off intermittency with symmetry breaking

Strain engineering for ultra-coherent nanomechanical oscillators

Effects of stochastic forces on the nonlinear behaviour of a silicon nitride membrane nanoelectromechanical resonator

Tunable Stochastic State Switching in 2D MoS 2 Nanomechanical Resonators with Nonlinear Mode Coupling and Internal Resonance

Strong coupling between single-electron tunneling and nano-mechanical motion

Note: Signal Amplification and Filtering with a Tristable Stochastic Resonance Cantilever