Novel Photoimaging System Based on Photoinduced Electron Transfer in Polymers Containing Pendant Benzophenone−Borate Salts

A. M. Sarker,D. Neckers,Alexander Mejiritski,A. Polykarpov
DOI: https://doi.org/10.1021/CM960103+
1996-07-11
Abstract:A new positive-tone photoimaging system developed by aqueous acid and based on photogeneration of polymeric amine via photoinduced electron transfer in polymers bearing pendant benzophenone−borate salts is reported. Though the current polymer has insufficient sensitivity to be used as a photoresist in current microlithography industry, the resolution attained and the stability of the original polymer in aqueous bases makes the system of potential interest for other future applications.
Materials Science,Chemistry
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