Pumped quantum systems: immersion fluids of the future?

Vikas Anant,Magnus Rådmark,Ayman F. Abouraddy,Thomas C. Killian,Karl K. Berggren

DOI: https://doi.org/10.1116/1.2121732

2005-09-28

Abstract:Quantum optical techniques may yield immersion fluids with high indices of refraction without absorption. We describe one such technique in which a probe field experiences a large index of refraction with amplification rather than absorption, and examine its practicality for an immersion lithography application. Enhanced index can be observed in a three-level system with a tunable, near-resonant, coherent probe and incoherent pump field that inverts population of the probe transition. This observation contradicts the common belief that large indices of refraction are impossible without absorption, however it is well in accord with existing electromagnetic theory and practice. Calculations show that a refractive index >> 2 is possible with practical experimental parameters. A scheme with an incoherent mixture of pumped and unpumped atoms is also examined, and is seen to have a lower refractive index (~2) accompanied by neither gain nor loss.

Optics

What problem does this paper attempt to address?

The key problem that this paper attempts to solve is: How to achieve an immersion fluid with a high refractive index through quantum - optical techniques without causing absorption, in order to support the further miniaturization of immersion lithography.

### Specific Problems and Solutions

1. **Background and Challenges**:
- Current immersion lithography techniques rely on immersion fluids with a high refractive index to improve resolution.
- Conventional wisdom holds that enhancing the refractive index near atomic resonance is always accompanied by absorption, which limits the application of high - refractive - index materials.
- Shrinking integrated circuit nodes requires shorter light source wavelengths or higher - refractive - index immersion fluids, but currently economically viable short - wave light sources have not been successfully developed.

2. **Proposed Method**:
- The author proposes a scheme based on quantum - optical techniques, using a pumped three - level system to achieve a high refractive index, and in this process the probe field is amplified rather than absorbed.
- In this scheme, a near - resonant probe laser experiences a high refractive index in the pumped quantum system and is amplified due to population inversion.

3. **Theoretical Analysis**:
- Use the density matrix equation to describe the dynamic behavior of the system and calculate the refractive index \( n \) and gain/absorption coefficient \( n'' \) seen by the probe laser.
- The results show that for reasonable experimental parameters, the maximum refractive index can reach approximately 6, much higher than the refractive index of traditional materials.

4. **Challenges in Practical Applications**:
- Linewidth broadening caused by temperature can significantly reduce the refractive index. For example, from 0K to room temperature, the maximum refractive index drops from approximately 6 to approximately 1.5.
- Power broadening and amplified spontaneous emission (ASE) can also cause the refractive index to decay rapidly.

5. **Improvement Scheme**:
- A scheme of using a combination of an absorptive two - level system and an amplifying three - level system is proposed, which can eliminate gain or loss while maintaining a high refractive index.
- This hybrid system can make the medium have neither gain nor loss for the probe light by adjusting the probing frequency, thereby achieving transparency and maintaining a high refractive index.

### Summary
The main contribution of this paper is to present a scheme to achieve a high refractive index with gain rather than absorption through quantum - optical techniques, providing a new direction for the next - generation immersion lithography. In addition, the author also discusses the problems that may be encountered in practical applications and proposes corresponding improvement measures.