On‐Chip THz Helical Antenna Based on Metal Self‐Rolled‐up Membrane Nanotechnology

Longyu Li,Wei He,Zhikun Zhou,Tao Yuan,Lei Sang,Yongfeng Mei,Xiaochen Chen,Wen Huang
DOI: https://doi.org/10.1002/admt.202400503
IF: 6.8
2024-06-19
Advanced Materials Technologies
Abstract:By utilizing the residual stress in multilayer metal nanomembrane, self‐rolled‐up THz helical antenna or even array antenna is able to be fabricated on chip. Fabricated sample shows the normal mode of the self‐rolled‐up THz helical antenna with rolled‐up inner diameter of 39.6 μm is able to operate at 0.223 THz with impedance bandwidth of 13 GHz. This paper demonstrates the on‐chip terahertz (THz) helical antenna based on metal self‐rolled‐up membrane (M‐SRuM) nanotechnology, which utilizes the residual stress in multilayer metal membrane deposited by electron beam (E‐beam) evaporation to provide the rolling force and to form the radiation body of the helical antenna. Precise design method is proposed based on multi‐physics modeling for mechanical and electrical analysis, and the two operating modes of on‐chip helical antenna are modeled and analyzed. The test results show that the normal mode of self‐rolled‐up THz helical antenna is able to operate at frequency as high as 0.223 THz with the corresponding impedance bandwidth of 13 GHz.
materials science, multidisciplinary
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