Abstract:Artiflcially structured electromagnetic (EM) materials have recently become an extremely active research area because of the possibility of creating materials which exhibit novel EM responses not available in natural materials such as negative refractive index (1). Such EM composites, often called metamaterials (MMs), are especially important for the technologically relevant terahertz (1THz = 10 12 Hz) frequency regime where there is a strong need to create com- ponents to realize applications ranging from spectroscopic identiflcation of hazardous materials to noninvasive imaging. For many of these potential applications, it is desirable to create MMs that exhibit a controlled active and/or tunable response (2). The MM device fabricated in this work is based on planar arrays of split-ring resonators (SRRs) coupled with microfabrication methods to create a bimaterial-cantilever-based THz MM resonance shifter/fllter. An individual element consists of two single SRRs put together on the split gap side with a cantilever sitting above. The two rings provide inductances, L, and the split gap provides a capacitance, C. The curvature of bimaterial (Al/SiNx) cantilevers can be precisely changed by controlling the ambient tempera- ture due to the difierent thermal expansion of Al and SiNx. The efiective LC resonance results in a frequency dependent transmission where, on resonance, a strongly enhanced electric fleld is concentrated in the gap of the SRR, and the resonance will be shifted when the cantilever bends up or down to change the capacitance of the SRR. Simulations indicate that it will be possible to tune the resonance peak by more than 170GHz which demonstrates the potential of creating THz devices such as switches, dynamic fllters, and phase shifters from bimaterial-cantilever-based metamaterials.

Dynamical Control of Terahertz Metamaterial Resonance Response Using Bimaterial Cantilevers