Integrating microsystems with metamaterials towards metadevices

Xiaoguang Zhao,G. Duan,Aobo Li,Chunxu Chen,Xin Zhang
DOI: https://doi.org/10.1109/TRANSDUCERS.2019.8808452
2019-01-28
Microsystems & Nanoengineering
Abstract:Electromagnetic metamaterials, which are a major type of artificially engineered materials, have boosted the development of optical and photonic devices due to their unprecedented and controllable effective properties, including electric permittivity and magnetic permeability. Metamaterials consist of arrays of subwavelength unit cells, which are also known as meta-atoms. Importantly, the effective properties of metamaterials are mainly determined by the geometry of the constituting subwavelength unit cells rather than their chemical composition, enabling versatile designs of their electromagnetic properties. Recent research has mainly focused on reconfigurable, tunable, and nonlinear metamaterials towards the development of metamaterial devices, namely, metadevices, via integrating actuation mechanisms and quantum materials with meta-atoms. Microelectromechanical systems (MEMS), or microsystems, provide powerful platforms for the manipulation of the effective properties of metamaterials and the integration of abundant functions with metamaterials. In this review, we will introduce the fundamentals of metamaterials, approaches to integrate MEMS with metamaterials, functional metadevices from the synergy, and outlooks for metamaterial-enabled photonic devices. Specially engineered materials known as metamaterials have led to a boost in the performance of optical and photonic devices, with yet further improvements within reach by finding ways to dynamically tune their properties. Metamaterials consist of arrays of structures smaller than the wavelength of light, offering an unprecedented opportunity to tune their interaction with electromagnetic waves. Xin Zhang’s team at Boston University has reviewed approaches to integrate microelectromechanical systems and nanoelectromechanical systems (MEMS and NEMS) with metamaterials to create metadevices. By using MEMS and NEMS to adjust how the array in a metamaterial is arranged, metadevices can be rapidly and reversibly reconfigured to detect, modulate, or respond to specific electromagnetic frequencies. The authors conclude by highlighting avenues for the improvement of metadevices, which have applications from LIDAR to 5G communication.
Computer Science
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