Abstract:In order to improve the spatial resolution of a confocal system, a radial birefringent pupil filter (RBPF) is introduced into a differential confocal system. RBPF consists of two polarizers with a birefringent element between them, and its pupil function is deduced from Jones matrix. The thickness and curvature radius of RBPF are optimized independently, using the first zero coordinate ratio. The pupil function is modulated by RBPF to enhance the half-width of the response function, and lateral resolution is improved when response curve is changed with the position of RBPF as well as the polarization; then axial super-resolution of the system can be guaranteed using differential confocal detection mechanism. In comparison with conventional pupil filtering technology, RBPF features high lateral resolution and can be easily produced; moreover, it also has a simple structure. Together with its low cost, RBPF provides a new way for the improvement of super-resolution of confocal system. It is indicated from theoretical analysis and preliminary experiments that the lateral resolution can be significantly improved and the measurement error is reduced by 76nm when measuring a standard grating of period 3μm; the axial resolution up to 3nm has been achieved using the optimized pupil filter. In addition to its application for measurement of a small irregular surface in a limited space, the whole differential confocal system proposed can be fitted onto a coordinate measuring machine for non-contact measurement of dimensions and surface roughness.

Electrically controllable polarization-assisted superresolution with radial birefringent filter

Electrically Controlled Transverse Superresolution Filter with Axial Focal Shift

Theoretical and Practical Guide for an Axial Superresolved Focus Via Gouy Phase Steering

Frequency-shifting confocal microscopy via azimuthally polarized Bessel-Gaussian beam

Phase encoding for sharper focus of the azimuthally polarized beam.

Focus shaping of Bessel-Gauss beam with radial varying polarization

Enhanced superprism effect based on positive/negative lateral shift of reflective beam in a Fabry-Perot filter.

A Method for Achieving Multiple Foci with Subdiffraction Resolution along the Axial Direction

Arbitrary Three-Dimensional Polarization Control Based On Cylindrical Vector Beams And Binary Phase Coding

Differential confocal technology based on radial birefringent pupil filtering principle

A Highly Efficient Superresolving Phase Filter for a Radially Polarized Beam

Spatial Separation of Azimuthally and Radially Polarized Beams from Non-Polarized Light Waves Based on the Electrically Controlled Birefringence Effect

40.3: Polarization‐dependent Binocular Waveguide Display with Patterned Cholesteric Liquid Crystal Optics

Super-Resolution Radially Polarized-Light Pupil-Filtering Confocal Sensing Technology

Polarization Transitions in the Focus of Radial-Variant Vector Circular Airy Beams.

A three-zone phase-only pupil filter for improving lateral resolution

Crystal-Based Pupil Filer for the Manipulation of the Vectorial Field in the Broad Band

Binary-amplitude Modulation Based Super-Oscillatory Focusing Planar Lens for Azimuthally Polarized Wave

Super-resolution radially polarized pupil-filtering confocal Raman spectroscopy technology

Super-resolution focusing with polarized optical beam

Creation of an Ultra-Long Depth of Focus Super-Resolution Longitudinally Polarized Beam with A Ternary Optical Element