Abstract:Significant progress has been made to develop silicon pixel technologies for use in the vertex and tracker regions of the proposed Compact Linear Collider (CLIC) detector design. The electron-positron collisions generated by this linear accelerator provide a clean, low-radiation environment for the inner detectors. However, physics-driven performance targets, the CLIC beam structure, and occupancies from beam-induced backgrounds place challenging requirements on detector technologies for this region. A pixel pitch down to 25 x 25$\mu$m$^{-2}$, material budget $\leq$ 0.2-2$\%X_0$ per layer, average power dissipation of down to 50mWcm$^{-2}$, position resolution of 3-7$\mu$m, and timing resolution as low as 5ns are called for in the vertex and tracking detectors. To this aim, a comprehensive R&D programme is ongoing to design and test silicon pixel detectors to fulfil these specifications, including both monolithic and hybrid devices. These studies involve Allpix$^2$ Monte Carlo and TCAD simulations, advanced 65nm ASIC and sensor design, laboratory testing, and beam tests of individual modules to determine the required performance parameters. The characterisation and simulation modelling of these devices has also lead to the development of a set of tools and software within the CLIC detector and physics (CLICdp) collaboration. This publication will present recent results from the technologies being developed and tested in view of the CLIC vertex and tracking detector requirements, such as various monolithic CMOS sensors, and fine pitch hybrid assemblies with planar sensors.

Monolithic CMOS Pixel R&D for the ILC at LBNL

Status of the Chronopixel Project

R&D for the CLIC Vertex and Tracking detectors

Beyond the CMOS sensors: the DoTPiX pixel concept and technology for the International Linear Collider A

Pixel detector R&D for the Compact Linear Collider

Developing a Monolithic Silicon Sensor in a 65 nm CMOS Imaging Technology for Future Lepton Collider Vertex Detectors

A Sensor with Analog and Digital Pixels in 0.15 micron SOI Technology

First measurements with monolithic active pixel test structures produced in a 65 nm CMOS process

Development of Fast and High Precision CMOS Pixel Sensors for an ILC Vertex Detector

Design and Performance of HV CMOS Sensors for Future Colliders by the RD50 Collaboration

Silicon detector R$\&$D for the future Electron-Ion Collider

Development of CMOS Pixel Sensors fully adapted to the ILD Vertex Detector Requirements

Overview of the SiLC R&D Activities

First Results with Prototype ISIS Devices for ILC Vertex Detector

Pixel front-end development in 65 nm CMOS technology

Development of a Depleted Monolithic CMOS Sensor in a 150 nm CMOS Technology for the ATLAS Inner Tracker Upgrade

Applications of CMOS technology at the ALICE experiment

Upgrade of the ALICE Inner Tracking System

ILC Instrumentation R&D at SCIPP

Characterization of passive CMOS sensors with RD53A pixel modules