Abstract:Fast, sensitive and stable detection of humidity is essential. In this paper, a 2D ultra-thin nanosheet Mxene was used as the material to form a sensitive film to construct the quartz crystal microbalance (QCM) humidity sensor by drop coating method. The element A in the MAX phase was dislodged by a simple liquid phase etching method. The morphology and composition of Mxene were studied by means of a series characterization methods, it was found the sample take on a ultrathin grapheme-like nanosheet. The test results show that the humidity sensor has 12.8Hz/% RH sensitivity, 6s and 2s (@ 90%)response/recovery time, maximum humidity hysteresis of 1.16%RH, good stability and selectivity. Finally, the adsorption enthalpy of water molecules on the surface of Mxene was explored by DFT calculation. It was found that residual F - played an important role in humitity sensing Introduction: The new two-dimensional (2D) material Mxene has been widely used in energy storage , battery , catalysis , electromagnetic shielding and other directions since it was discovered by the research team of Professor Yury Gogotsi of Drexel University in 2011.Ti 3 C 2 T x has good electronic conductivity and hydrophilicity, it is the most widely studied and mature of all Mxenes. This work combines Mxene-Ti 3 C 2 T x with the QCM test platform to further enhance the application of Mxene materials on humidity sensors. By optimizing the method in the previous literature, the Ti 3 AlC 2 powder was etched in LiF / HCl solution to remove the Al element, some post-treatment such us ultrasonic was carry out to obtain a single-layer Ti 3 C 2 T x solution that can be used to directly prepare the device. The obtained samples were characterized by XRD, SEM, TEM, EDS, XPS and BET, etc, it was found that Mxene with a large specific surface area has a good single-layer sheet structure, and the surface contains a large number of -OH, -O, -F functional groups. This single-layer sheet structure with large specific surface area and abundant active sites is more conducive to the adsorption of water molecules. By detecting the relative humidity of 11.3% - 97.3% shows that the sensor with the best performance has excellent sensitivity of 12.8Hz/% RH, 6s and 2s (@ 90%) rapid response/recovery time, maximum humidity hysteresis of 1.16%RH, good short-term repeatability, long-term stability, and excellent cross-sensitivity. Through characterization and simulation, it is found that -F functional group plays a certain role in the excellent humidity sensitivity. This not only provides a new possibility for the application of 2D materials in humidity sensor, but also widens the application of Mxene materials in sensor field. Figure 1

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