Micro-Electrochemical Rotational Vibration Sensor with SOI-Based Microelectrodes Used for Seismic Monitoring

Tian Liang,Zhenyu Sun,Lintao Hu,Maoqi Zhu,Mingbo Zhang,Qinghua Liu,Jian Chen,Deyong Chen,Yulan Lu,Junbo Wang
DOI: https://doi.org/10.1109/tim.2023.3330213
IF: 5.6
2023-01-01
IEEE Transactions on Instrumentation and Measurement
Abstract:This article develops a microelectrochemical rotational vibration sensor with silicon-on-insulator-based (SOI-based) microelectrodes used for seismic monitoring. The incoming rotational vibration is translated into currents through electrochemical reactions that occur on microelectrodes. Theoretical analysis and numerical simulations were carried out to model the rotational vibration sensor with key parameters optimized. The developed SOI-based microelectrodes were fabricated into mesh structures based on microfabrication technology and assembled to form the microelectrochemical rotational vibration sensor. The characterization results showed that the rotational vibration sensor featured a high sensitivity of 270 V/(rad/s2), a low noise level of $1.99\times 10^{-8}$ (rad/s2)/Hz1/2, and no responses to linear vibrations. The detection of a natural earthquake indicated that the developed microelectrochemical rotational vibration sensor can be further used in seismology for seismic monitoring.
engineering, electrical & electronic,instruments & instrumentation
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