Abstract:Electronic devices get smaller and smaller in every generation. In micro-/nano-electronic devices such as high electron mobility transistors, heat dissipation has become a crucial design consideration due to the ultrahigh heat flux that has a negative effect on devices' performance and their lifetime. Therefore, thermal transport performance enhancement is required to adapt to the device size reduction. β-Ga2O3 has recently gained significant scientific interest for future power devices because of its inherent material properties such as extremely wide bandgap, outstanding Baliga's figure of merit, large critical electric field, etc. This work aims to use a machine learning approach to search promising substrates or heat sinks for cooling β-Ga2O3, in terms of high interfacial thermal conductance (ITC), from large-scale potential structures taken from existing material databases. With the ITC dataset of 1633 various substrates for β-Ga2O3 calculated by full density functional theory, we trained our recently developed convolutional neural network (CNN) model that utilizes the fused orbital field matrix (OFM) and composition descriptors. Our model proved to be superior in performance to traditional machine learning algorithms such as random forest and gradient boosting. We then deployed the CNN model to predict the ITC of 32 716 structures in contact with β-Ga2O3. The CNN model predicted the top 20 cubic and noncubic substrates with ITC on the same level as density functional theory (DFT) results on β-Ga2O3/YN and β-Ga2O3/MgO interfaces, which has the highest ITC of 1224 and 1211 MW/m2K, respectively, among the DFT-ITC datasets. Phonon density of states, group velocity, and scattering effect on high heat flux transport and consequently increased ITC are also investigated. Moderate to high phonon density of states overlap, high group velocity, and low phonon scattering are required to achieve high ITC. We also found three Magpie descriptors with strong Pearson correlation with ITC, namely, mean atomic number, mean atomic weight, and mean ground state volume per atom. Calculations of such descriptors are computationally efficient, and therefore, these descriptors provide a new route for quickly screening potential substrates from large-scale material pools for high-performance interfacial thermal management of high-electron mobility transistor devices.

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