Real time optical observation and control of atomically thin transition metal dichalcogenide synthesis

Hamid Reza Rasouli,Naveed Mehmood,Onur Çakıroğlu,T. Serkan Kasırga,Onur Cakiroglu,Talip Serkan Kasirga

DOI: https://doi.org/10.1039/C9NR00614A

IF: 6.7

2019-10-07

Nanoscale

Abstract:Understanding the mechanisms involved in chemical vapour deposition (CVD) synthesis of atomically thin transition metal dichalcogenides (TMDCs) requires precise control of numerous growth parameters. All the proposed mechanisms and their relation to the growth conditions are inferred from characterising intermediate formations obtained by stopping the growth blindly. To fully understand the reaction routes that lead to the monolayer formation, real time observation and control of the growth are needed. Here, we demonstrate how a custom-made CVD chamber that allows real time optical monitoring can be employed to study the reaction routes that are critical to the production of the desired layered thin crystals in salt assisted TMDC synthesis. Our real time observations reveal the reaction between the salt and the metallic precursor to form intermediate compounds which lead to the layered crystal formation. We identified that both the vapour-solid-solid and vapour-liquid-solid growth routes are in an interplay. Furthermore, we demonstrate the role H 2 plays in the salt-assisted WSe 2 synthesis. Finally, we observed the synthesis of the MoSe 2 /WSe 2 heterostructures optically, and elucidated the conditions required for both lateral and vertical heterostructure synthesis.

materials science, multidisciplinary,physics, applied,nanoscience & nanotechnology,chemistry