Abstract:Exploiting semiconductor fabrication techniques, natural carriers of quantum information such as atoms, electrons, and photons can be embedded in scalable integrated devices. Integrated optics provides a versatile platform for large-scale quantum information processing and transceiving with photons. Scaling up the integrated devices for quantum applications requires highperformance single-photon generation and photonic qubit-qubit entangling operations. However, previous demonstrations report major challenges in producing multiple bright, pure and identical single-photons, and entangling multiple photonic qubits with high fidelity. Another notable challenge is to noiselessly interface multiphoton sources and multiqubit operators in a single device. Here we demonstrate on-chip genuine multipartite entanglement and quantum teleportation in silicon, by coherently controlling an integrated network of microresonator nonlinear single-photon sources and linear-optic multiqubit entangling circuits. The microresonators are engineered to locally enhance the nonlinearity, producing multiple frequencyuncorrelated and indistinguishable single-photons, without requiring any spectral filtering. The multiqubit states are processed in a programmable linear circuit facilitating Bell-projection and fusion operation in a measurement-based manner. We benchmark key functionalities, such as intra-/inter-chip teleportation of quantum states, and generation of four-photon Greenberger-HorneZeilinger entangled states. The production, control, and transceiving of states are all achieved in micrometer-scale silicon chips, fabricated by complementary metal-oxide-semiconductor processes. Our work lays the groundwork for scalable on-chip multiphoton technologies for quantum computing and communication.

Interfacing scalable photonic platforms: solid-state based multi-photon interference in a reconfigurable glass chip

High-speed thin-film lithium niobate quantum processor driven by a solid-state quantum emitter

On-Chip Generation and Manipulation of Entangled Photons Based on Reconfigurable Lithium-Niobate Waveguide Circuits

Large Reconfigurable Quantum Circuits with SPAD Arrays and Multimode Fibers

Silicon Photonic Devices for Scalable Quantum Information Applications

Reconfigurable photonics with on-chip single-photon detectors

Deterministic photon source interfaced with a programmable silicon-nitride integrated circuit

On-Chip Quantum Information Processing with Distinguishable Photons

On-Chip Hong–Ou–Mandel Interference from Separate Quantum Dot Emitters in an Integrated Circuit

Hybrid III-V/Silicon photonic circuits embedding generation and routing of entangled photon pairs

Hybrid Integration of Solid-State Quantum Emitters on a Silicon Photonic Chip

On-chip quantum interference between independent lithium niobate-on-insulator photon-pair sources

Nanophotonic approaches for integrated quantum photonics

A chip-based array of near-identical, pure, heralded single photon sources

On-Chip Single-Photon Sifter

Chip-based photon quantum state sources using nonlinear optics

Chip-to-chip quantum teleportation and multi-photon entanglement in silicon

Large-scale Integration of Multidimensional Quantum Photonics Circuits on Silicon

Nanomechanical single-photon routing

High-fidelity four-photon GHZ states on chip

Electro-optic routing of photons from single quantum dots in photonic integrated circuits