ITO-Based Electrically Tunable Metasurface for Active Control of Light Transmission

Ruize Ma,Dandan Wen,Yu Mao,Peiyang Li,Dong Li
DOI: https://doi.org/10.3390/nano14191606
IF: 5.3
2024-10-05
Nanomaterials
Abstract:In recent years, the rapid development of dynamically tunable metasurfaces has provided a new avenue for flexible control of optical properties. This paper introduces a transmission-type electrically tunable metasurface, employing a series of subwavelength-scale silicon (Si) nanoring structures with an intermediate layer of Al2O3-ITO-Al2O3. This design allows the metasurface to induce strong Mie resonance when transverse electric (TE) waves are normally incident. When a bias voltage is applied, the interaction between light and matter is enhanced due to the formation of an electron accumulation layer at the ITO-Al2O3 interface, thereby altering the resonance characteristics of the metasurface. This design not only avoids the absorption loss of metal nanostructures and has a large modulation depth, but also shows compatibility with complementary metal oxide semiconductor (CMOS) technology.
Materials Science,Physics,Engineering
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