Ultra-High Vacuum Cells Realized by Miniature Ion Pump Using High-Efficiency Plasma Source

Yuichi Kurashima,Atsuhiko Maeda,Naoto Oshima,Taisei Motomura,Takashi Matsumae,Mitsuhiro Watanabe,Hideki Takagi

DOI: https://doi.org/10.3390/s24124000

IF: 3.9

2024-06-20

Sensors

Abstract:In recent years, there has been significant interest in quantum technology, characterized by the emergence of quantum computers boasting immense processing power, ultra-sensitive quantum sensors, and ultra-precise atomic clocks. Miniaturization of quantum devices using cold atoms necessitates the employment of an ultra-high vacuum miniature cell with a pressure of approximately 10−6 Pa or even lower. In this study, we developed an ultra-high vacuum cell realized by a miniature ion pump using a high-efficiency plasma source. Initially, an unsealed miniature ion pump was introduced into a vacuum chamber, after which the ion pump's discharge current, depending on vacuum pressures, was evaluated. Subsequently, a miniature vacuum cell was fabricated by hermetically sealing the miniature vacuum pump. The cell was successfully evacuated by a miniature ion pump down to an ultra-high vacuum region, which was derived by the measured discharge current. Our findings demonstrate the feasibility of achieving an ultra-high vacuum cell necessary for the operation of miniature quantum devices.

engineering, electrical & electronic,chemistry, analytical,instruments & instrumentation

What problem does this paper attempt to address?

### Problems Addressed by the Paper

The paper primarily addresses the issue of using ultra-high vacuum microcells (with pressure around 10^−6 Pa or lower) in the operation of micro quantum devices. Specifically:

1. **Demand for Micro Quantum Devices**: In recent years, quantum technologies (such as quantum computers, ultra-sensitive quantum sensors, and ultra-precise atomic clocks) have garnered significant attention. To achieve the miniaturization of these devices, especially to reduce cold atom technology to desktop size, a microcell capable of operating in an ultra-high vacuum environment is required.

2. **Maintaining Ultra-High Vacuum Environment**: Even after sealing the cell, maintaining the ultra-high vacuum environment within the sealed cell remains a challenge, as gases may be generated from the inner surface of the cell or permeate through bonding interfaces. Therefore, a system capable of actively pumping to maintain the ultra-high vacuum level is needed.

3. **Development of Micro Ion Pump**: The paper proposes a micro ion pump integrated with an efficient plasma source to achieve this goal. The research team first evaluated the variation of the ion pump's discharge current with vacuum pressure under unsealed conditions. Then, they achieved the integration of the ultra-high vacuum cell with the micro ion pump through sealed bonding and evaluated its pumping characteristics based on the discharge current of the integrated ion pump. The results show that this micro ion pump can successfully evacuate the cell to the ultra-high vacuum region (around 10^−6 Pa), verifying its feasibility for use in micro quantum devices.