Volatile N,N ′ - Dialkyl-β-dialdiminate complexes of magnesium and zinc as possible chemical vapor deposition precursors

Claire E. Schmit,Gregory S. Girolami
DOI: https://doi.org/10.1016/j.poly.2024.116985
IF: 2.975
2024-04-11
Polyhedron
Abstract:A series of volatile magnesium(II) and zinc(II) bis(β-dialdiminato) complexes (of stoichiometry M[ RN ( CH ) 3 NR ] 2 where R = methyl, ethyl, isopropyl, or tert- butyl) have been prepared and investigated as potential precursors for the chemical vapor deposition of thin films. Several of the compounds have been characterized crystallographically, and the metal centers adopt pseudo-tetrahedral geometries with the two ligands forming six-membered rings with the metal center. All eight compounds sublime cleanly both in vacuum and under 1 atm of N 2 (unsublimed residue < 5 % for all compounds), and the most volatile compounds (those having N- methyl substituents) have vapor pressures of 1 Torr at 88 (Mg) and 90 °C (Zn). In general, metal complexes of N,N- dialkyl-β-dialdiminate ligands are more volatile than their corresponding N,N- dialkyl-β-diketiminate and N,N- dialkylamidinate analogues.
chemistry, inorganic & nuclear,crystallography
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