Abstract:Optical spectrometers are widely used scientific equipment with many applications involving material characterization, chemical analysis, disease diagnostics, surveillance, etc. Emerging applications in biomedical and communication fields have boosted the research in the miniaturization of spectrometers. Recently, reconstruction-based spectrometers have gained popularity for their compact size, easy maneuverability, and versatile utilities. These devices exploit the superior computational capabilities of recent computers to reconstruct hyperspectral images using detectors with distinct responsivity to different wavelengths. In this paper, we propose a CMOS compatible reconstruction-based on-chip spectrometer pixels capable of spectrally resolving the visible spectrum with 1 nm spectral resolution maintaining high accuracy (>95 %) and low footprint (8 um x 8 um), all without the use of any additional filters. A single spectrometer pixel is formed by an array of silicon photodiodes, each having a distinct absorption spectrum due to their integrated nanostructures, this allows us to computationally reconstruct the hyperspectral image. To achieve distinct responsivity, we utilize random photon-trapping nanostructures per photodiode with different dimensions and shapes that modify the coupling of light at different wavelengths. This also reduces the spectrometer pixel footprint (comparable to conventional camera pixels), thus improving spatial resolution. Moreover, deep trench isolation (DTI) reduces the crosstalk between adjacent photodiodes. This miniaturized spectrometer can be utilized for real-time in-situ biomedical applications such as Fluorescence Lifetime Imaging Microscopy (FLIM), pulse oximetry, disease diagnostics, and surgical guidance.

A Compact Single-Pixel Spectral Measurement System

A Cmos Image Sensor For Monochromatic Spectrum Imaging

Miniaturized Spectroscopy System Based on a Semiconductor Nanofilm

Integrated Microring Spectrometer with In-Hardware Compressed Sensing to Break the Resolution-Bandwidth Limit for General Continuous Spectrum Analysis

Miniature Spectrometer Based on a Fourier Transform Spectrometer Chip and a Commercial Photodetector Array

Cmos-Compatible Integrated Spectrometer Based on Echelle Diffraction Grating and Msm Photodetector Array

Single-nanowire Spectrometers

Scalable On‐Chip Microdisk Resonator Spectrometer

Broadband miniaturized spectrometers with a van der Waals tunnel diode

Digital Fourier Transform Spectroscopy: a High-Performance, Scalable Technology for On-Chip Spectrum Analysis

Ultra-compact scalable spectrometer with low power consumption

A High-Performance Spectrometer with Two Spectral Channels Sharing the Same BSI-CMOS Detector.

Broadband on-chip single-photon spectrometer

Reconstruction-based spectroscopy using CMOS image sensors with random photon-trapping nanostructure per sensor

Single-pixel p-graded-n junction spectrometers

Integrated reconstructive spectrometer with programmable photonic circuits

CMOS-compatible reconstructive spectrometers with self-referencing integrated Fabry-Perot resonators

Ultra-compact monolithically-integrated silicon single-microring spectrometer breaking the free-spectral-range limitation

On-Chip Measurement of Photoluminescence with High Sensitivity Monolithic Spectrometer

An optics-free single-pixel spectrometer using a broadband and tunable dynamic detector