Photolithographic Patterning of Perovskite Thin Films for Multicolor Display Applications

Chen Zou,Cheng Chang,Di Sun,Karl F. Böhringer,Lih Y. Lin,Karl F. Böhringer

DOI: https://doi.org/10.1021/acs.nanolett.0c00701

IF: 10.8

2020-04-23

Nano Letters

Abstract:Metal halide perovskites are emerging as attractive materials for light-emitting diode (LED) applications. The external quantum efficiency (EQE) has experienced a rapid progress and reached over 21%, comparable to the state of the art organic and quantum dot LEDs. For metal halide perovskites, their simple solution-processing preparation, facile band gap tunability, and narrow emission line width provide another attractive route to harness their superior optoelectronic properties for multicolor display applications. In this work, we demonstrate a high-resolution, large-scale photolithographic method to pattern multicolor perovskite films. This approach is based on a dry lift-off process which involves the use of parylene as an intermediary and the easy mechanical peeling-off of parylene films on various substrates. Using this approach, we successfully fabricated multicolor patterns with red and green perovskite pixels on a single substrate, which could be further applied in liquid crystal displays (LCDs) with blue backlight. Besides, a prototype green perovskite micro-LED display under current driving has been demonstrated.

materials science, multidisciplinary,chemistry, physical,physics, applied, condensed matter,nanoscience & nanotechnology