Growth and Characterization of Sputtered InAlN Nanorods on Sapphire Substrates for Acetone Gas Sensing

Ray-Hua Horng,Po-Hsiang Cho,Jui-Che Chang,Anoop Kumar Singh,Sheng-Yuan Jhang,Po-Liang Liu,Dong-Sing Wuu,Samiran Bairagi,Cheng-Hsu Chen,Kenneth Järrendahl,Ching-Lien Hsiao
DOI: https://doi.org/10.3390/nano14010026
IF: 5.3
2023-12-21
Nanomaterials
Abstract:The demand for highly sensitive and selective gas sensors has been steadily increasing, driven by applications in various fields such as environmental monitoring, healthcare, and industrial safety. In this context, ternary alloy indium aluminum nitride (InAlN) semiconductors have emerged as a promising material for gas sensing due to their unique properties and tunable material characteristics. This work focuses on the fabrication and characterization of InAlN nanorods grown on sapphire substrates using an ultra-high vacuum magnetron sputter epitaxy with precise control over indium composition and explores their potential for acetone-gas-sensing applications. Various characterization techniques, including XRD, SEM, and TEM, demonstrate the structural and morphological insights of InAlN nanorods, making them suitable for gas-sensing applications. To evaluate the gas-sensing performance of the InAlN nanorods, acetone was chosen as a target analyte due to its relevance in medical diagnostics and industrial processes. The results reveal that the InAlN nanorods exhibit a remarkable sensor response of 2.33% at 600 ppm acetone gas concentration at an operating temperature of 350 °C, with a rapid response time of 18 s. Their high sensor response and rapid response make InAlN a viable candidate for use in medical diagnostics, industrial safety, and environmental monitoring.
materials science, multidisciplinary,physics, applied,nanoscience & nanotechnology,chemistry
What problem does this paper attempt to address?
The paper aims to address the demand for high-sensitivity and selective gas sensors, particularly in applications such as environmental monitoring, healthcare, and industrial safety. Specifically, the paper focuses on the study of Indium Aluminum Nitride (InAlN) nanorods prepared using the magnetron sputtering epitaxial growth method on sapphire substrates and explores their potential application as acetone gas sensors. ### Main Objectives: 1. **Preparation and Characterization**: Prepare InAlN nanorods using ultra-high vacuum magnetron sputtering epitaxial growth technology (MSE) by precisely controlling the indium composition, and characterize their structure and morphology. 2. **Performance Evaluation**: Evaluate the performance of the prepared InAlN nanorods as acetone gas sensors, including response rate, response time, and recovery time. 3. **Theoretical Modeling**: Use density functional theory (DFT) generalized gradient approximation (GGA) methods to establish a theoretical model to elucidate the gas sensing mechanism of acetone on InAlN sensors. ### Problems Addressed: - **High Sensitivity and Fast Response**: Develop an acetone gas sensor with high sensitivity and fast response time, suitable for fields such as medical diagnostics, industrial safety, and environmental monitoring. - **Material Property Optimization**: Optimize the material properties of InAlN nanorods by adjusting the indium composition to make them more suitable for gas sensing applications.