Abstract:Nonlinear dielectric metasurfaces provide a promising approach to control and manipulate frequency conversion optical processes at the nanoscale, thus facilitating both advances in fundamental research and the development of new practical applications in photonics, lasing, and sensing. Here, we employ symmetry-broken metasurfaces made of centrosymmetric amorphous silicon for resonantly enhanced second- and third-order nonlinear optical response. Exploiting the rich physics of optical quasi-bound states in the continuum and guided mode resonances, we comprehensively study through rigorous numerical calculations the relative contribution of surface and bulk effects to second-harmonic generation (SHG) and the bulk contribution to third-harmonic generation (THG) from the meta-atoms. Next, we experimentally achieve optical resonances with high quality factors, which greatly boosts light-matter interaction, resulting in about 550 times SHG enhancement and nearly 5000-fold increase of THG. A good agreement between theoretical predictions and experimental measurements is observed. To gain deeper insights into the physics of the investigated nonlinear optical processes, we further numerically study the relation between nonlinear emission and the structural asymmetry of the metasurface and reveal that the generated harmonic signals arising from linear sharp resonances are highly dependent on the asymmetry of the meta-atoms. Our work suggests a fruitful strategy to enhance the harmonic generation and effectively control different orders of harmonics in all-dielectric metasurfaces, enabling the development of efficient active photonic nanodevices.

Second-harmonic generation from singular metasurfaces

Second-harmonic Generation of Structured Light by Transition-Metal Dichalcogenide Metasurfaces

A transformation optics approach to singular metasurfaces

Second-Harmonic Enhancement from a Nonlinear Plasmonic Metasurface Coupled to an Optical Waveguide

Resonantly Enhanced Second- and Third-Harmonic Generation in Dielectric Nonlinear Metasurfaces

Second harmonic generation from Chalcogenide metasurfaces via mode coupling engineering

Resonance-enhanced Generation of Optical Harmonics from Dielectric Metasurfaces

Second Harmonic Generation in Monolithic Lithium Niobate Metasurfaces.

Giant Enhancement of Second-Harmonic Generation in Hybrid Metasurface Coupled MoS2 with Fano-Resonance Effect

Second harmonic generation and third harmonic enhancement in silicon by a composite metasurface and intense terahertz

Third harmonic generation enhanced by multipolar interference in complementary silicon metasurfaces

Giant asymmetric second-harmonic generation in bianisotropic metasurfaces based on bound states in the continuum

Efficient Second Harmonic Generation from Gaas All-Dielectric Metasurfaces

Nonlinear van der Waals metasurfaces with resonantly enhanced light generation

Second‐Harmonic Generation in Strained Silicon Metasurfaces

Efficient Generation Of Second Harmonic From A Kind Of Nonlinear Magnetic Metamaterial Composite

Enhancing second harmonic generation efficiency and effective nonlinear susceptibility via metasurfaces employing split-ring resonators

Plasmonic metasurfaces for controlling harmonic generations

Resonantly Enhanced Second-Harmonic Generation Using III–V Semiconductor All-Dielectric Metasurfaces

Efficient Second-Harmonic Generation from Dielectric Inter-subband Polaritonic Metasurfaces Coupled to Lattice Resonance

Second harmonic generation in glass-based metasurfaces using tailored surface lattice resonances