Photolithographic fabrication and characterization of ultrafast response integrated planar micro-supercapacitors for on-chip energy storage devices

Li-Xue Fan,Xing Chen,Bai-Yan Guo,Bo-Yu Song,Cheng-Jie Zhang,Yu Gao,Jun-Chao Jiao,Xin Zhang,Guang-Yu Zhang
DOI: https://doi.org/10.1080/00150193.2024.2324691
2024-11-28
Ferroelectrics
Abstract:The rapid development of portable wearable miniaturized electronic devices has put forward higher requirements and challenges for micro energy and power sources. The electrochemical performance of on-chip integrated planar micro-supercapacitors was studied based on aminated graphene quantum dots (A-GQDs) at the scan rates of 0.01 V s −1 –10000 V s −1 . At the scan rate of 0.01 V s −1 , the area capacitance was 170.00 μF cm −2 , the energy density was 24.00 nWh cm −2 and the power density was 0.01 μW cm −2 . At the scan rate of 100 V s −1 , the area capacitance was 0.20 μF cm −2 , the energy density was 0.30 nWh cm −2 and the power density was 25.00 μW cm −2 . At the scan rate of 10000 V s −1 , the area capacitance was 0.02 μF cm −2 , the energy density was 0.04 nWh cm −2 and the power density was 199.28 μW cm −2 . The capacity retention rate after 10000 charging and discharging cycles was about 93.30%, indicating its good cycling stability. This work demonstrated that the A-GQDs was excellent electrode materials for ultrafast response and integrability of on-chip energy storage devices.
materials science, multidisciplinary,physics, condensed matter
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