Abstract:Exploiting semiconductor fabrication techniques, natural carriers of quantum information such as atoms, electrons, and photons can be embedded in scalable integrated devices. Integrated optics provides a versatile platform for large-scale quantum information processing and transceiving with photons. Scaling up the integrated devices for quantum applications requires highperformance single-photon generation and photonic qubit-qubit entangling operations. However, previous demonstrations report major challenges in producing multiple bright, pure and identical single-photons, and entangling multiple photonic qubits with high fidelity. Another notable challenge is to noiselessly interface multiphoton sources and multiqubit operators in a single device. Here we demonstrate on-chip genuine multipartite entanglement and quantum teleportation in silicon, by coherently controlling an integrated network of microresonator nonlinear single-photon sources and linear-optic multiqubit entangling circuits. The microresonators are engineered to locally enhance the nonlinearity, producing multiple frequencyuncorrelated and indistinguishable single-photons, without requiring any spectral filtering. The multiqubit states are processed in a programmable linear circuit facilitating Bell-projection and fusion operation in a measurement-based manner. We benchmark key functionalities, such as intra-/inter-chip teleportation of quantum states, and generation of four-photon Greenberger-HorneZeilinger entangled states. The production, control, and transceiving of states are all achieved in micrometer-scale silicon chips, fabricated by complementary metal-oxide-semiconductor processes. Our work lays the groundwork for scalable on-chip multiphoton technologies for quantum computing and communication.

Scalable Deterministic Integration of Two Quantum Dots into an On-Chip Quantum Circuit

Hybrid integration of deterministic quantum dots-based single-photon sources with CMOS-compatible silicon carbide photonics

On-Chip Hong–Ou–Mandel Interference from Separate Quantum Dot Emitters in an Integrated Circuit

Hybrid Integration of Solid-State Quantum Emitters on a Silicon Photonic Chip

128 Identical Quantum Sources Integrated on a Single Silica Chip

Silicon Photonic Devices for Scalable Quantum Information Applications

Reconfigurable quantum photonic circuits based on quantum dots

Indistinguishable photons from deterministically integrated single quantum dots in heterogeneous GaAs/Si$_3$N$_4$ quantum photonic circuits

Quantum Photonic Interconnect

Advances in Chip‐Scale Quantum Photonic Technologies

Chip-to-chip quantum teleportation and multi-photon entanglement in silicon

On-Chip Single-Photon Sifter

Chip-To-Chip Quantum Photonic Interconnect By Path-Polarization Interconversion

Super-radiant emission from quantum dots in a nanophotonic waveguide

Highly Indistinguishable Single Photons from Droplet-Etched GaAs Quantum Dots Integrated in Single-Mode Waveguides and Beamsplitters

Deterministic photon source interfaced with a programmable silicon-nitride integrated circuit

Controlled integration of selected detectors and emitters in photonic integrated circuits

Heterogeneous integration of spin–photon interfaces with a CMOS platform

Large-scale Integration of Multidimensional Quantum Photonics Circuits on Silicon

Quantum interference in heterogeneous superconducting-photonic circuits on a silicon chip