Finite time stable inversion in discrete frequency domain: Accuracy analysis, improvement and application to wafer stage

Li Li,Yang Liu,Xuewei Fu,Fazhi Song,Jiubin Tan
DOI: https://doi.org/10.1016/j.isatra.2022.06.021
IF: 7.3
2022-06-23
ISA Transactions
Abstract:Highlights • The finite-time stable inversion problem is investigated for the NMP systems. • The discrete-frequency-domain solution is revealed to be suffered from the initial-state issue and the leakage-error issue that degrade the inversion accuracy. • Pre-actuation and post-actuation techniques are shown to be effective to improve the inversion accuracy of the discrete-frequency-domain solution. Stable inversion represents a classic approach to achieve the exact inverse input for non-minimum-phase (NMP) systems. Solutions deduced based on state-space equations and transfer functions have been frequently proposed, however they are basically developed in the infinite-time horizon and are inherently time-domain computation methods. Considering the practical finite-time tracking tasks, this paper investigates the finite-time stable inversion problem. In particular, the discrete-frequency-domain solution which enables frequency-domain computation is studied. As the main contribution of the paper, the accuracy issues of the discrete-frequency-domain solution are revealed and an easy-to-use procedure is provided to improve the inversion accuracy by utilizing pre-actuation and post-actuation methods. Simulation and experiment both verify the effectiveness of the developed discrete-frequency-domain stable inversion technique.
automation & control systems,instruments & instrumentation,engineering, multidisciplinary
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