Abstract:Integrated quantum photonics leverages the on-chip generation of nonclassical states of light to realize key functionalities of quantum devices. Typically, the generation of such nonclassical states relies on whispering gallery mode resonators, such as integrated optical micro-rings, which enhance the efficiency of the underlying spontaneous nonlinear processes. While these kinds of resonators excel in maximizing either the temporal confinement or the spatial overlap between different resonant modes, they are usually associated with large mode volumes, imposing an intrinsic limitation on the efficiency and footprint of the device. Here, we engineer a source of time-energy entangled photon pairs based on a silicon photonic crystal cavity, implemented in a fully CMOS-compatible platform. In this device, resonantly enhanced spontaneous four-wave mixing converts pump photon pairs into signal/idler photon pairs under the energy-conserving condition in the telecommunication C-band. The design of the resonator is based on an effective bichromatic confinement potential, allowing it to achieve up to nine close-to-equally spaced modes in frequency, while preserving small mode volumes, and the whole chip, including grating couplers and access waveguides, is fabricated in a single run on a silicon-on-insulator platform. Besides demonstrating efficient photon pair generation, we also implement a Franson-type interference experiment, demonstrating entanglement between signal and idler photons with a Bell inequality violation exceeding five standard deviations. The high generation efficiency combined with the small device footprint in a CMOS-compatible integrated structure opens a pathway toward the implementation of compact quantum light sources in all-silicon photonic platforms.

Generation of ultraviolet entangled photons in a semiconductor

Creating Polarization-Entangled Photon Pairs from a Semiconductor Quantum Dot Using the Optical Stark Effect.

On-demand generation of indistinguishable polarization-entangled photon pairs

Semiconductor devices for entangled photon pair generation: a review

Entangling extreme ultraviolet photons through strong field pair generation

Hyper-entangled Photon Pairs from Single Quantum Dots

An electrically injected photon-pair source at room temperature

A solid-state source of strongly entangled photon pairs with high brightness and indistinguishability

Generation of entangled photon pairs from a silicon bichromatic photonic crystal cavity

Generation and characterization of polarization-entangled states using quantum dot single-photon sources

On-demand Semiconductor Single-Photon Source with Near-Unity Indistinguishability

Broadband generation of photon-pairs from a CMOS compatible device

Resonant Semiconductor Metasurfaces for Generating Complex Quantum States

Direct generation of photon triplets using cascaded photon-pair sources

On-Demand Semiconductor Source of Entangled Photons Which Simultaneously Has High Fidelity, Efficiency, and Indistinguishability

Hybrid-Cascaded Generation of Tripartite Telecom Photons Using an Atomic Ensemble and A Nonlinear Waveguide

High-performance quantum entanglement generation via cascaded second-order nonlinear processes

Polarization-entangled photon-pair source with van der Waals 3R-WS2 crystal

Generating Entangled Photon Pairs from a Cavity-Qed System

Cooper-pair-based photon entanglement without isolated emitters