應用於TFT-LCD 光罩製程之電子級硫酸回收研究

林偉立,Wei‐li Lin
DOI: https://doi.org/10.6845/NCHU.2010.00247
Abstract:For the global market share on thin film transistor-liquid crystal display(TFT-LCD), Taiwan has become one of the leaders mainly due to the aggressive expansion of Chimei Innolux Corporation and AU Optronics Corporation in recent years. In 2008, Taiwan’s production volume surpassed South Korea and optoelectronic related chemical market has also grown up to 230 billion New Taiwan dollars. Thus, the quantity of wet chemical consumption is enormous and used chemicals are usually treated as wastes. If these spent chemical cannot be reused or recycled, they definitely will become heavy environmental burdens. This study focused on a TFT-LCD photomask company in Central Taiwan Science Park to study the feasibility on recovering and reusing the spent electronic-grade sulfuric acid. The waste mixture of spent sulfuric acid and hydrogen peroxide was distilled to remove water and hydrogen peroxide. An acid-washed activated carbon (AC) was employed to remove trace metal ions through adsorption. Field-emission scanning electron microscope was also used to observe the surface of this AC to compare the differences between general AC and acid-washed AC. A hand-held electronic specific gravity meter was used to measure the purity of the recovered sulfuric acid. Finally, an ICP-MS was used for the quantification of residual trace metals in the recovered sulfuric acid. Experimental results show that the recycled sulfuric acid by distillation at 160℃ could be used by LED optoelectronic industries. The sulfuric acid recycled by activated carbon adsorption is close to the specification of BASF ultra pure electronic (UPS) grade. It is good for the first rinsing step in TFT-LCD photomask cleaning process. The cost saved by in-plant recovering instead of disposal in this model plant is about 2 million New Taiwan dollars a year. If all the integrated circuit(IC)and TFT-LCD photomask plants in Taiwan adopt this method, more than fifty million New Taiwan dollars will be saved per year. In addition, recovery of sulfuric acid can effectively conserve natural resources, reduce industrial waste, and elevate the global competitiveness of TFT-LCD panel and photomask industries in Taiwan.
Chemistry,Materials Science,Environmental Science,Engineering
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