Integration of graphene and MoS 2 on silicon carbide: Materials science challenges and novel devices

Filippo Giannazzo,Salvatore Ethan Panasci,Emanuela Schilirò,Antal Koos,Béla Pécz
DOI: https://doi.org/10.1016/j.mssp.2024.108220
IF: 4.1
2024-02-13
Materials Science in Semiconductor Processing
Abstract:Although silicon carbide (SiC) is widely regarded as the material of choice for power electronics, the development of several new applications on the SiC material platform is currently explored. The integration of two dimensional (2D) materials, such as graphene and molybdenum disulfide (MoS 2 ) provides silicon carbide (SiC) with additional functionalities, allowing to expand its range of applications. This article reviews the state-of-the art methods for scalable growth of graphene and MoS 2 on SiC, specifically on the hexagonal polytypes. Some open research directions in materials integration have been also discussed, like the use of epitaxial graphene (Epi-Gr) as interlayer for van der Waals (vdW) epitaxy of GaN or Ga 2 O 3 on SiC substrates, and the growth of 2D forms of GaN materials by confined epitaxy at Epi-Gr/SiC interface. Finally, an overview of recently proposed electronics/optoelectronics applications of these material systems, specifically for high frequency electronics, quantum metrology, THz and UV detectors, is provided. This work can be a useful guide for silicon carbide community on these open research directions.
engineering, electrical & electronic,materials science, multidisciplinary,physics, condensed matter, applied
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