Remote Epitaxy: Fundamentals, Challenges, and Opportunities

Bo-In Park,Jekyung Kim,Kuangye Lu,Xinyuan Zhang,Sangho Lee,Jun Min Suh,Dong-Hwan Kim,Hyunseok Kim,Jeehwan Kim
DOI: https://doi.org/10.1021/acs.nanolett.3c04465
IF: 10.8
2024-03-04
Nano Letters
Abstract:Advanced heterogeneous integration technologies are pivotal for next-generation electronics. Single-crystalline materials are one of the key building blocks for heterogeneous integration, although it is challenging to produce and integrate these materials. Remote epitaxy is recently introduced as a solution for growing single-crystalline thin films that can be exfoliated from host wafers and then transferred onto foreign platforms. This technology has quickly gained attention, as it can be applied to a wide variety of materials and can realize new functionalities and novel application platforms. Nevertheless, remote epitaxy is a delicate process, and thus, successful execution of remote epitaxy is often challenging. Here, we elucidate the mechanisms of remote epitaxy, summarize recent breakthroughs, and discuss the challenges and solutions in the remote epitaxy of various material systems. We also provide a vision for the future of remote epitaxy for studying fundamental materials science, as well as for functional applications.
materials science, multidisciplinary,chemistry, physical,physics, applied, condensed matter,nanoscience & nanotechnology
What problem does this paper attempt to address?
### Problems Addressed by the Paper The paper "Remote Epitaxy: Fundamentals, Challenges, and Opportunities" aims to explore the potential applications and challenges of remote epitaxy technology in next-generation electronic devices. Specifically, the paper attempts to address the following key issues: 1. **Preparation and Integration of Single-Crystal Materials**: - Advanced heterogeneous integration technology is crucial for next-generation electronic devices. Single-crystal materials are an important component for achieving heterogeneous integration, but their preparation and integration process is highly challenging. - Remote epitaxy technology, as a solution, can grow single-crystal thin films without relying on the substrate and transfer them to other platforms. 2. **Mechanisms and Challenges of Remote Epitaxy**: - Remote epitaxy is a complex process that requires precise control of experimental conditions for successful execution. The paper elaborates on the fundamental mechanisms of remote epitaxy and summarizes recent research breakthroughs. - Additionally, the paper discusses the challenges encountered in different material systems during remote epitaxy and the corresponding solutions. 3. **Future Application Prospects**: - Remote epitaxy has broad application prospects not only in 3D integration and flexible electronics but also in studying fundamental issues in materials science. - The paper envisions the revolutionary and exciting applications of remote epitaxy technology in the future electronics industry, including potential applications in advanced electronics, optoelectronics, photonics, and biomedical devices. Through these discussions, the paper aims to provide researchers with a comprehensive perspective to understand the current status and future development directions of remote epitaxy technology.