High-robustness autofocusing method in the microscope with laser-based arrayed spots

Zhihao Wang,Xin Zhang,Xindong Chen,Liang Miao,Ke Kang,Chenggang Mo
DOI: https://doi.org/10.1364/oe.510835
IF: 3.8
2024-01-30
Optics Express
Abstract:Zhihao Wang, Xin Zhang, Xindong Chen, Liang Miao, Ke Kang, Chenggang Mo Accurate and rapid autofocus technology plays a crucial role in various fields, including automatic optical inspection technology, ... [Opt. Express 32, 4902-4915 (2024)]
optics
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