Abstract:A framework of the multispectral microscopic method combining both hardware design and deep‐learning algorithms is developed for wafer‐scale characterization of ultra‐thin atomic crystals. Multispectral image restoration caused by optical imaging modality drifts and automated layer number identification are studied using deep learning models including the generative adversarial network and 3D U‐Net. Ultra‐thin atomic crystals are promising for fabricating next‐generation photonic and optoelectronic devices. Wafer‐scale characterization techniques are highly desired for efficient and accurate thickness identification of these crystals and their heterostructures. Optical contrast between atomic crystals and substrates based on Fresnel theory is a key technique for the identification of thicknesses. Both RGB color information and spectroscopic information have been explored for layer number counting and implemented with machine learning algorithms based on large amounts of data for feature extraction. In this work, a multispectral microscopic method combining the hardware design and deep‐learning algorithms is developed. Multispectral image restoration during large‐area scanning caused by optical imaging modality drifts and automated layer number identification based on multispectral grayscale images are studied using deep learning models: generative adversarial network (GAN) and 3D U‐Net. These models are trained using custom‐built multispectral data sets and evaluated quantitatively with indicators (Dice coefficient, confusion matrix, structural similarity). After these models are trained and tested, they are integrated into a graphic user interface for on‐site identification use. The developed method provides a framework using multispectral images for 3D data reconstruction and segmentation and can be implemented for wafer‐scale characterization of heterostructures containing different species of ultra‐thin atomic crystals.

Optical spatial differentiation enabled layer sensing of two-dimensional atomic crystals

Isotropic three-dimensional imaging with lattice light-sheet difference microscopy.

Multilayered Analog Optical Differentiating Device: Performance Analysis on Structural Parameters

Versatile Optical Determination of Two-Dimensional Atomic Crystal Layers

Optical Detection of the Susceptibility Tensor in Two-Dimensional Crystals

Layered Superlensing in Two-Dimensional Photonic Crystals

Optical Computing of Spatial Differentiation Without Fourier Optics

Multispectral Microscopic Multiplexed (3M) Imaging of Atomically‐Thin Crystals Using Deep Learning

Two-dimensional optical spatial differentiation and high-contrast imaging

Monolayer Excitonic Emission for Imaging Spatial Dispersion of Photonic Crystals

Optical Spatial Differentiator for a Synthetic Three-Dimensional Optical Field.

Layer-by-layer assembly of multilayer optical lattices: Application to displaced dice lattice

Recent advances in free-standing two-dimensional crystals with atomic thickness: design, assembly and transfer strategies.

Isolated Structures in Two-Dimensional Optical Superlattice

Visualization of transparent particles based on optical spatial differentiation

Identifying atomically thin crystals with diffusively reflected light

Transient Optical Modulation of Two-Dimensional Materials by Excitons at Ultimate Proximity

Generalized Aubry-Andre-Harper Models in Optical Superlattices

Designing Artificial Two-Dimensional Landscapes via Room-Temperature Atomic-Layer Substitution

Modeling Atomistically Assembled Diffractive Optics in Solids

Imaging of Interlayer Coupling in van der Waals Heterostructures Using a Bright-Field Optical Microscope