A simple printable etchant formulation for etching oxidic, transparent and conductive layers

Shin-Shin Wang,Sui-Hui Wu,Jyh-Horung Chen
DOI: https://doi.org/10.1109/IMPACT.2013.6706675
2013-10-01
Impact
Abstract:In this paper we present a simple printable etchant formulation for etching uniform lines having a width about 60 μm on a crystalline ITO thin film. The etching media can be removed from the treated surface after etching by water without leaving residues that is eco-friendly.
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