Plasma Carburization of an Axisymmetric Steel Sample

M. Gegick,G. W. Young
DOI: https://doi.org/10.1137/S0036139992232349
IF: 1.9
1994-08-01
SIAM Journal on Applied Mathematics
Abstract:A mathematical model is formulated to simulate a high temperature plasma-enhanced chemical vapor deposition (CVD) reactor This high temperature situation is applicable to plasma-enhanced carburization of steel. Plasma -enhanced carbCrization is an alternative fO traditional atmosphere carburization and may reduce many problems associated with the latter process The model includes coupling between the plasma physics the hydrodynamics of the gas phase, hydrodynamic transport of neutral species, chemical kinetic surface reactions, ion-assisted deposition, and diffusion into the steel. The model is limited to a dilute single species system, neglecting gas phase dissociation mechanisms It also assumes a uniform distribution of electrons throughout the bulk The model is analyzed and solved using asymptotic methods to simplify the governing equations Through the development of quasi analytical solutions sortie of the complex interactions and couplings among the physical mechanisms acting in the plasma CVU proces...
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