Energy Parameters of the Simplest Chemical Reactions Occurring at the First Stages of Silicon Electrochemical Etching – DFT-Modeling

F Ptashchenko,University ",Odesa Maritime Academy",F. Ptashchenko,,,
DOI: https://doi.org/10.21272/jnep.15(5).05003
2023-01-01
Journal of Nano- and Electronic Physics
Abstract:Journal of Nano- and Electronic Physics. Scientific journal. ISSN: 2077-6772. Journal abbreviation: J. Nano- Electron. Phys. No page charges. All articles are freely available on-line. Issued 4 times per year. Publisher: Sumy State University. (Sumy, Ukraine)
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