A new approach for fast field calculation in electrostatic electron lens design and optimization

Neda Hesam Mahmoudi Nezhad,Mohamad Ghaffarian Niasar,Cornelis W. Hagen,Pieter Kruit
DOI: https://doi.org/10.1038/s41598-024-55518-3
IF: 4.6
2024-02-29
Scientific Reports
Abstract:In electron optics, calculation of the electric field plays a major role in all computations and simulations. Accurate field calculation methods such as the finite element method (FEM), boundary element method and finite difference method, have been used for years. However, such methods are computationally very expensive and make the computer simulation challenging or even infeasible when trying to apply automated design of electrostatic lens systems with many free parameters. Hence, for years, electron optics scientists have been searching for a fast and accurate method of field calculation to tackle the aforementioned problem in the design and optimization of electrostatic electron lens systems. This paper presents a novel method for fast electric field calculation in electrostatic electron lens systems with reasonably high accuracy to enable the electron-optical designers to design and optimize an electrostatic lens system with many free parameters in a reasonably short time. The essence of the method is to express the off-axis potential in an axially symmetrical coordinate system in terms of derivatives of the axial potential up to the fourth order, and equate this to the potential of the electrode at that axial position. Doing this for a limited number of axial positions, we get a set of equations that can be solved to obtain the axial potential, necessary for calculating the lens properties. We name this method the fourth-order electrode method because we take the axial derivatives up to the fourth order. To solve the equations, a quintic spline approximation of the axial potential is calculated by solving three sets of linear equations simultaneously. The sets of equations are extracted from the Laplace equation and the fundamental equations that describe a quintic spline. The accuracy and speed of this method is compared with other field calculation methods, such as the FEM and second order electrode method (SOEM). The new field calculation method is implemented in design/optimization of electrostatic lens systems by using a genetic algorithm based optimization program for electrostatic lens systems developed by the authors. The effectiveness of this new field calculation method in optimizing optical parameters of electrostatic lens systems is compared with FEM and SOEM and the results are presented. It should be noted that the formulation is derived for general axis symmetrical electrostatic electron lens systems, however the examples shown in this paper are with cylindrical electrodes due to the simplicity of the implementation in the software.
multidisciplinary sciences
What problem does this paper attempt to address?
The paper aims to address the issue of slow and time-consuming electric field calculations in the design and optimization of electrostatic electron lens systems. Specifically, traditional methods such as the Finite Element Method (FEM), Boundary Element Method (BEM), and Finite Difference Method (FDM), although highly accurate, take too long to compute, making the automated design of electrostatic lens systems with multiple degrees of freedom very difficult or even unfeasible. To solve this problem, the paper proposes a new fast electric field calculation method, the Fourth-Order Electrode Method (FOEM). This method approximates the off-axis potential by retaining the fourth-order derivative of the axial potential and solves the Laplace equation using quintic spline interpolation, thereby achieving fast and relatively accurate electric field calculations. Additionally, the paper combines the FOEM method with a genetic algorithm to optimize the geometric shape and voltage distribution of the electrostatic lens system, improving design efficiency. The paper compares the performance of FOEM with other existing methods (such as FEM and the Second-Order Electrode Method, SOEM) in terms of calculation speed and accuracy, and discusses its effectiveness in practical applications.