Three-dimensional reconstruction of super-resolved white-light interferograms based on deep learning

Lei Xin,Xin Liu,Zhongming Yang,Xingyu Zhang,Zhishan Gao,Zhaojun Liu

DOI: https://doi.org/10.1016/j.optlaseng.2021.106663

IF: 5.666

2021-10-01

Optics and Lasers in Engineering

Abstract:<p>White-light scanning interferometry is an effective and widely used technology for measuring the microscopic three-dimensional morphology of an object. Its vertical resolution can reach the sub-nanometer level, and its lateral resolution reaches submicron level. However, for the samples containing complex structure or high-density periodic distribution structural units, the measurement results are strongly restricted by magnification and numerical aperture (NA) of the microscopic objective. In this paper, we proposed a three-dimensional reconstruction algorithm for white-light interferograms after super resolution processing, using fast super-resolution convolutional neural networks (FSRCNN) to improve the detailed information of the interferograms, and then we used centroid method combined with the five-step phase-shift method to extract the zero optical path difference (ZOPD) position of the interference signal after super resolution processing. After processed by the proposed method, the interferograms collected by the 10X microscope objective (NA=0.3) recovered the 3D surface is the same as that measured by the 100X microscope objective (NA=0.7), which is proved by the experiment results.</p>

optics

What problem does this paper attempt to address?

This paper mainly solves the problem of insufficient measurement accuracy of small three-dimensional topography with complex or high-density periodic distribution structures in white light interferometric imaging due to the limitations of magnification and numerical aperture. The study proposes a deep learning-based super-resolution reconstruction algorithm, specifically using Fast Super-Resolution Convolutional Neural Network (FSRCNN) to enhance the detail information of the interference image, and then combining the five-step phase-shifting method and centroid method to extract the zero optical path difference position after super-resolution processing. The experimental results show that through this method, the interference image collected by a 10X (NA=0.3) microscope objective can be restored to the same three-dimensional surface as measured by a 100X (NA=0.7) microscope objective. This method improves the measurement accuracy of low magnification objective without additional equipment, and can quickly achieve super-resolution processing of white light interference images, thereby optimizing white light interferometry measurement technology.

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