Transparent conducting electrodes of NiO/Ag/NiO applied in ZnO-based metal–semiconductor–metal ultraviolet photodetectors

Jun-Dar Hwang,Y. R. Liou,Y. J. Chiou

DOI: https://doi.org/10.2139/ssrn.4732739

IF: 4.291

2024-05-22

Sensors and Actuators A Physical

Abstract:Owing to low sheet resistance and high transparency, dielectric/metal/dielectric (DMD) structures have been developed as alternative transparent conducting electrodes (TCEs) to replace indium tin oxide (ITO). However, most DMD TCEs employ a low-work-function dielectric, resulting in a low barrier height at the DMD/zinc oxide (ZnO) interface. In this study, nickel oxide (NiO) with a high work function was used to prepare NiO/Ag/NiO (NAN) TCE, and the NAN TCE was deposited on ZnO to fabricate ultraviolet photodetectors (UV-PDs) with a metal–semiconductor–metal (MSM) structure. Conventional MSM UV-PDs using gold (Au) as the electrode were prepared for comparison. The prepared NAN TCE exhibited low sheet resistance of 6.5 Ω/sq. and high transmittance exceeding 40%, demonstrating that NAN is a good TCE. However, the Au electrode exhibited a transmittance lower than 20% for most incident wavelength regions. MSM-PDs with the NAN electrode revealed a dark current lower than those with an Au electrode by more than two orders of magnitude. This is owing to the surface defects of ZnO were passivated by Ni diffusion from NiO. The photocurrent of MSM-PDs with the Au electrode was less dependent on the bias voltage, whereas the photocurrent exhibited a large increase with the bias voltage in the MSM-PDs with NAN electrode. This behaviour led to MSM-PDs with NAN electrode exhibiting a photo/dark current ratio approximately 64 times higher than those with Au electrode. The detectivity decreased with the bias voltage in MSM-PDs with Au electrode. In contrast, the detectivity increased with the bias voltage in MSM-PDs with NAN electrode. The detectivity is as high as 1.1 × 10 12 Jones and the noise equivalent power is as low as 4.2 × 10 −13 W in the MSM-PDs with the NAN electrode.

engineering, electrical & electronic,instruments & instrumentation