Abstract:Active metasurfaces, which are arrays of actively tunable resonant elements, can dynamically control the wavefront of the scattered light at a subwavelength scale. To date, most active metasurfaces that enable dynamic wavefront shaping operate in reflection. On the other hand, active metasurfaces operating in transmission are of considerable interest as they can readily be integrated with chip-scale light sources, yielding ultra-compact wavefront shaping devices. Here, we report designs for all-dielectric low-loss active metasurfaces which can dynamically manipulate the transmitted light wavefront in the near-infrared wavelength range. Our active metasurfaces feature an array of amorphous silicon (a-Si) pillars on a silica substate, which support resonances with quality factors (Q-factors) as high as 9800, as well as other lower-Q resonances. First, we demonstrate that high-Q resonance dips observed in transmission can be transformed into a transmission resonance peak by positioning a-Si pillar resonators at a prescribed distance from a crystalline Si substrate, defined by a silica spacer layer. Next, we report the design of metasurface geometry with realistic interconnect architectures that enable thermo-optic dynamic beam switching with switching times as low as 7.3 {\mu}s. Beam switching is observed for refractive index differences between neighboring metasurface elements as low as 0.0026. Finally, we demonstrate that metasurface structures with both high-Q and lower-Q modes and realistic interconnect architectures can be used for dynamic beam steering.

A thermally controlled high-Q metasurface lens

Temperature-controlled Optical Switch Metasurface with Large Local Field Enhancement Based on FW-BIC

Thermally-Switchable Metalenses Based on Quasi-Bound States in the Continuum

All-dielectric high-Q dynamically tunable transmissive metasurfaces

High quality factor metasurfaces for two-dimensional wavefront manipulation

Electrically Tunable Terahertz Focusing Modulator Enabled by Liquid Crystal Integrated Dielectric Metasurface

Active tuning of high-Q dielectric metasurfaces

Liquid Crystal Integrated Dynamic Terahertz Metalenses

Wavefront shaping and modulation with resonant electro-optic phase gradient metasurfaces

Electro-Optical Modulation in High Q Metasurface Enhanced with Liquid Crystal Integration

Multifunctional Metasurface Lens With Tunable Focus Based on Phase Transition Material

Liquid Crystal Integrated Metalens with Dynamic Focusing Property.

MEMS-tunable dielectric metasurface lens using thin-film PZT for large displacements at low voltages

Design, fabrication, and spectral characterization of temperature-dependent liquid crystal-based metamaterial to tune dielectric metasurface resonances

Monolithically integrated wide field-of-view metalens by angular dispersionless metasurface

Liquid Crystal Embedded Dielectric Metalens for Active Focal Length Tuning at the Microwave Range

High-Quality-Factor Silicon-on-Lithium Niobate Metasurfaces for Electro-optically Reconfigurable Wavefront Shaping

High quality factor silicon-on-lithium niobate metasurfaces for electro-optically reconfigurable wavefront shaping

High-Q filtering and dynamic modulation in all-dielectric metasurfaces induced by quasi-BIC.

Thermal Control of Plasmonic Surface Lattice Resonances

Multifocal Terahertz Lens with Adjustable Focal Points