Highly precise thickness measurement of multilayer films based on the cross-correlation algorithm using a widely tunable MG-Y laser

Yang Cheung,Zhenguo Jing,Ang Li,Pengdong Cao,Da-Peng Zhou,Wei Peng
DOI: https://doi.org/10.1364/ao.522283
IF: 1.9
2024-04-25
Applied Optics
Abstract:Yang Cheung, Zhenguo Jing, Ang Li, Pengdong Cao, Da-Peng Zhou, Wei Peng Inspired by the demodulation algorithm of Fabry–Perot composite sensors in the field of fiber-optic sensing, this paper proposes a ... [Appl. Opt. 63, 3570-3575 (2024)]
optics
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