Abstract:Additive manufacturing (AM) represents a set of manufacturing processes that create complex 3D parts out of polymers, metals, and ceramics. AM of metals and ceramics is widely used to produce parts for aerospace, automotive, and medical applications. At the micro- and nano-scales, AM is poised to become the enabling technology for efficient 3D microelectromechanical systems (MEMS), 3D micro-battery electrodes, 3D electrically small antennae, micro-optical components, and photonics. Today, the minimum feature size for most commercially available metal and ceramic AM is limited to ~20-50 μm. Currently, no established processes can reliably produce complex 3D metal and ceramic parts with sub-micron features. In this thesis, we first demonstrate a nanoscale metal AM process that can produce ~300 nm features out of nanocrystalline, nanoporous nickel using synthesized hybrid organic-inorganic materials, two-photon lithography, and pyrolysis. We study microstructure and mechanical properties of as-fabricated nickel architectures and compare their structural strength to established AM processes. We then show how this process can be extended to other metals and metalloids, including Mg, Ge, Si, and Ti. This study extends further into nanoscale AM of transparent, high refractive index materials for micro-optics and photonic crystals. We develop an AM process to 3D print fully dense nanocrystalline rutile titanium dioxide (TiO₂) with feature dimensions down to ~120 nm. We carefully study and model the relationship between feature dimensions and process parameters to achieve a Finally, a microscale AM process of titanium dioxide is demonstrated for photocatalytic water treatment. We show how synthesized hybrid organic-inorganic materials can be applied for stereolithography to print TiO₂ architectures with 100 μm features. We use the developed 3D printing process to investigate the effect of 3D architecture on the efficiency of photocatalytic water treatment. This work establishes a versatile and efficient pathway to create three-dimensional nano-architected metals and ceramics and to investigate their properties for applications in 3D MEMS, micro-optics, photonics, and photocatalysis.

Strategies for Integrating Metal Nanoparticles with Two‐Photon Polymerization Process: Toward High Resolution Functional Additive Manufacturing

Two-Photon Polymerization Printing with High Metal Nanoparticle Loading

Multiphoton Polymerization-based Micro/Nanomanufacturing Toward Precision Medicine

A novel synthetic route to metal–polymer nanocomposites by in situ suspension and bulk polymerizations

One-step Patterning of Sub-wavelength Plasmonic Gratings in Metal-Polymer Composites

Fabrication of Polymeric 3D Structure Containing Metal/metal Oxide Nanoparticles by Two-Photon Processes

Simultaneous Additive and Subtractive Three-Dimensional Nanofabrication Using Integrated Two-Photon Polymerization and Multiphoton Ablation

High-aspect-ratio three-dimensional polymer and metallic microstructure microfabrication using two-photon polymerization

New metal-plastic hybrid additive manufacturing strategy: Fabrication of arbitrary metal-patterns on external and even internal surfaces of 3D plastic structures

Plasmonic and Semiconductor Nanoparticles Interfere with Stereolithographic 3D Printing

Copolymerization of Metal Nanoparticles: A Route to Colloidal Plasmonic Copolymers

Structural Evolution of Three-Component Nanoparticles in Polymer Nanoreactors

Intrinsic Field-Induced Nanoparticle Assembly in Three-Dimensional (3D) Printing Polymeric Composites

Additive Manufacturing of 3D Nano-Architected Metals

Structural Fabrication and Functional Modulation of Nanoparticle–Polymer Composites

One-step Interfacial Thiol-Ene Photopolymerization for Metal Nanoparticle-Decorated Microcapsules (Mnp@mcs).

3D Nanolithography via Holographic Multi‐Focus Metalens

Free-space direct nanoscale 3D printing of metals and alloys enabled by two-photon decomposition and ultrafast optical trapping

Surface‐Functionalization of Oleate‐Capped Nano‐Emitters for Stable Dispersion in 3D‐Printable Polymers

Three-dimensional Micro/nano-Fabrication by Integration of Additive and Subtractive Femtosecond-Laser Direct Writing Processes

Printing on particles: combining two-photon nanolithography and capillary assembly to fabricate multi-material microstructures