Real-Time Acetone Vapor Detection Using Mid-Infrared Nanoporous Membrane

Zhihai Lin,Austin Caruso,Megan Makela,Pao Tai Lin
DOI: https://doi.org/10.1109/jsen.2022.3177619
IF: 4.3
2022-07-15
IEEE Sensors Journal
Abstract:Real-time and non-destructive acetone vapor detection was demonstrated using a miniaturized mid-infrared (mid-IR) sensor. The sensing device was made of ultrathin nanoporous anodic aluminum oxide (AAO) membrane embedded in a polydimethylsiloxane (PDMS) micro-gas chamber. The AAO membrane is transparent in the range of 2.5- m that covers the characteristic acetone vapor absorption bands, thus providing high specificity and sensitivity for acetone vapor detection. Real-time monitoring of acetone vapor pulses was performed at = 2.9, 3.3, and m. The sensitivity of the AAO membrane increased at a smaller nanopore diameter (D) and a larger pore density (N). A 5 parts per million (ppm) sensitivity was demonstrated utilizing a D = 20 nm AAO with a large surface area (S) of . Hence, our compact mid-IR AAO sensor provides a new device platform for in-situ and accurate acetone gas detection.
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