Abstract:The objective of this study was to investigate the modification of glass surfaces by the synergistic combination of cold plasma and chemical surface modification techniques. Glass surface hydrophobicity was obtained as a result of various plasma and deposition operational conditions. The mechanisms governing the hydrophobization process were also studied. Glass plates were activated with plasma using different gases (oxygen and argon) at different treatment times, ranging from 30 to 1800 s. Then, the plasma-treated surfaces were exposed to hexamethyldisilazane vapors at different temperatures, i.e., 25, 60, and 100 °C. Complete characterization, including contact angle measurements, surface free energy calculations, 3D profilometry, X-ray photoelectron spectroscopy, Fourier-transform infrared spectroscopy, and scanning electron microscopy, was accomplished. It was found that the extent of the hydrophobicity effect depends on both the plasma pre-treatment and the specific conditions of the hexamethyldisilazane deposition process. Plasma activation led to the formation of active sites on the glass surface, which promoted the adsorption and reaction of hexamethyldisilazane species, thereby inducing surface chemical modification. Longer plasma pre-treatment resulted in stronger modification on the glass surface, resulting in changes in the surface roughness. The largest water contact angle of ≈100° was obtained for the surface activated by argon plasma for 1800 s and exposed to hexamethyldisilazane vapors at 25 °C. The changes in the surface properties were caused by the introduction of the hydrophobic trimethylsilyl groups onto the glass surface as well as roughness development.

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