Abstract:Amorphous titanium dioxide TiO2 (a-TiO2) has been widely studied, particularly as a protective coating layer on semiconductors to prevent corrosion and promote electron-hole conduction in photoelectrochemical reactions. The stability and longevity of a-TiO2 is strongly affected by the thickness and structural heterogeneity, implying that understanding the structure properties of a-TiO2 is crucial for improving the performance. This study characterized the structural and electronic properties of a-TiO2 thin films (~17nm) grown on Si by Atomic Layer Deposition (ALD). Fluctuation spectra V(k) and angular correlation functions were determined with 4-dimensional scanning transmission electron microscopy (4D-STEM), which revealed the distinctive medium-range ordering in the a-TiO2 film. A realistic atomic model of a-TiO2 was established guided by the medium-range ordering and the previously reported short-range ordering of a-TiO2 film, as well as the interatomic potential. The structure was optimized by the StructOpt code using a genetic algorithm that simultaneously minimizes energy and maximizes match to experimental short- and medium-range ordering. The StructOpt a-TiO2 model presents an improved agreements with the medium-range ordering and the k-space location of the dominant 2-fold angular correlations compared with a traditional melt-quenched model. The electronic structure of the StructOpt a-TiO2 model was studied by ab initio calculation and compared to the crystalline phases and experimental results. This work uncovered the medium-range ordering in a-TiO2 thin film and provided a realistic a-TiO2 structure model for further investigation of structure-property relationships and materials design. In addition, the improved multi-objective optimization package StructOpt was provided for structure determination of complex materials guided by experiments and simulations.

Structure and electronic properties of amorphous strontium titanate

Octahedral and polar phase transitions in freestanding films of SrTiO3

Effect of oxygen-ion implantation on the local electronic structures of strontium-titanate single crystals: An investigation using synchrotron-based x-ray diffraction and x-ray photoemission techniques

The fluctuated structural/electronic properties of SrTiO3 two-dimensional materials caused by surface effects

Surface properties of atomically flat poly-crystalline SrTiO3

Structural Properties of Plastically Deformed SrTiO3 and KTaO3

The chemical bond and atomic displacements in SrTiO3 from X‐ray diffraction analysis

Crystallite size and microstrain in the structure of SrTiO3 formed by magnetron deposition with and without O2 flow through the deposition chambre

Electron Energy-Loss Study Of The Electronic Structure Of Atomic Scale Srtio(3)-Srmno(3)-Lamno(3) Superlattices

Microstructure of sputter-deposited strontium titanate films

Origin of Oxygen Partial Pressure-Dependent Conductivity in SrTiO3

Structure and ferromagnetic instability of the oxygen-deficient SrTiO$_3$ surface

Experimentally informed structure optimization of amorphous TiO2 films grown by atomic layer deposition

Enhanced Piezoresponse and Dielectric Properties for Ba1-XSrXTiO3 Composition Ultrathin Films by the High-Throughput Method

Structural Properties of Two-Dimensional Strontium Titanate: A First-Principles Investigation

Stoichiometry and Thickness of Epitaxial SrTiO$_{3}$ on Silicon (001): an Investigation of Physical, Optical and Electrical Properties

Structural and magnetic properties of S = 3/2 chemically disordered perovskite Sr2TiMnO6

Tailoring structural, electronic, elastic and optical properties of Strontium-based XSrO 3 (X= Rb, Cs) oxide perovskites employing density functional theory

Some Unusual Behavior of Dielectric Properties of SrTiO3 Metal Organic Chemical Vapor Deposition Grown Thin Films

Thickness dependent thermal conductivity of strontium titanate thin films on silicon substrate

Oxygen vacancies in SrTiO$_{3}$ thin films at finite temperatures: A first-principles study