Guest Editorial Process-Level Machine Learning Applications in Semiconductor Manufacturing

Gian Antonio Susto,Alain Diebold,Andreas Kyek,Chia-Yen Lee,Nital S. Patel
DOI: https://doi.org/10.1109/tsm.2022.3167798
IF: 2.7
2022-05-07
IEEE Transactions on Semiconductor Manufacturing
Abstract:The constantly increasing availability of data, the rapid expansion in computational and storage capacities of information technology systems, and algorithmic advances in Machine Learning (ML) and Artificial Intelligence (AI) are making a huge impact in the manufacturing industry for improving efficiency, operations and throughput. The semiconductor industry, being one of the most data-intensive industries, has seen the diffusion of several ML-based technologies in recent years.
engineering, manufacturing, electrical & electronic,physics, condensed matter, applied
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