Design method of soft X-ray and vacuum ultraviolet optical system based on plane-symmetric aberration theory

Yiqing Cao
DOI: https://doi.org/10.1007/s10043-022-00739-y
IF: 1.2
2022-05-18
Optical Review
Abstract:Soft X-ray and vacuum ultraviolet optical system has the imaging performance of plane-symmetric optical system, this paper propose a design method of this kind of optical systems based on the third-order aberration theory of plane-symmetric optical system. First, applying the aberration expressions to calculate all kinds of wave aberrations of every optical element of optical system and building the wave aberration equilibrium equations, and we propose to apply self-adaptive variation probability genetic optimization algorithm to solve them to obtain the initial structure parameters. Second, the evaluation function of imaging performance of optical system is studied and the corresponding expression is given, and then we use the same algorithm discussed in the above for solve the function. Finally, the design method discussed in this paper is applied to design a soft X-ray and vacuum ultraviolet optical system consisting of double elements and its imaging results before and after the optimization are compared and analyzed; and it will verify the effectiveness of the proposed method in this paper. The results show that the design method provides an effective measure for design soft X-ray and vacuum ultraviolet optical system and has a strong practical value.
optics
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